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A kind of crn coating, preparation method and application

A technology of coating and transition layer, applied in coating, metal material coating process, vacuum evaporation plating, etc., can solve the problem of low hardness of CrN coating, and achieve the effect of improving hardness

Active Publication Date: 2020-09-29
PEKING UNIV SHENZHEN GRADUATE SCHOOL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of the above-mentioned deficiencies in the prior art, the object of the present invention is to provide a CrN coating, preparation method and application, aiming at solving the problem of low hardness of the current CrN coating

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  • A kind of crn coating, preparation method and application
  • A kind of crn coating, preparation method and application
  • A kind of crn coating, preparation method and application

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preparation example Construction

[0032] The present invention also provides a method for preparing the above-mentioned CrN coating, comprising the following steps:

[0033] Step A, performing plasma cleaning on the surface of the substrate.

[0034] Specifically, the vacuum chamber is first evacuated to a vacuum degree ≤ 10 -4 Pa, then pass in an inert gas (such as Ar gas or a mixture of two or more inert gases), keep the pressure of the vacuum chamber at 0.5-5Pa, and use a gas ion source to conduct plasma on the substrate under the action of the second bias Etching and cleaning to eliminate organic matter adsorbed on the surface of the substrate, the discharge power is preferably 0.5-5kW, the second bias voltage is a DC bias voltage, the bias voltage is preferably 400V-1200V, and the etching time can be 5-30min. Wherein, the gas ion source is preferably an anode layer ion source, which is generated by a gas plasma generator, and may be a Hall ion source or a Kaufmann ion source.

[0035] Step B. Under an ...

Embodiment 1

[0044] 1) Vacuumize the vacuum chamber of the magnetron sputtering equipment through the pumping system to make the vacuum of the back and bottom reach 10 -4 Pa.

[0045] 2) Gas plasma cleaning Introduce Ar gas into the vacuum chamber to keep the vacuum chamber pressure at about 1Pa, use the anode layer ion source to perform plasma etching cleaning on the substrate under the action of bias voltage, and eliminate the organic matter adsorbed on the surface of the substrate , the power of the anode layer ion source is 1kW, the bias voltage is DC bias voltage, the magnitude is 600V, and the etching time is 20min.

[0046] 3) Preparation of Cr transition layer A cylindrical metal plasma source is used to perform HiPIMS discharge on the Cr target. The purity of the Cr target is 99.9%-99.99%. The HiPIMS discharge voltage is 900V, the frequency is 100Hz, the pulse width is 200μs, and at low bias The Cr transition layer is deposited under the cooperation of , the bias voltage is DC b...

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Abstract

The invention discloses a CrN coating, a preparation method and application. The CrN coating is of a nano-twin crystal structure. According to the CrN coating, the preparation method and the application, cylindrical metal plasma sources are combined with magnetron sputtering technology, purification and energy of a metal ion are precisely controlled, and thus the high density nano-twin crystal structure is formed in the CrN ceramic coating. With the nano-twin crystal structure, hardness of the CrN coating can be improved greatly.

Description

technical field [0001] The invention relates to the fields of surface engineering and hard coatings, in particular to a CrN coating, a preparation method and an application. Background technique [0002] CrN coating is widely used in cutting tools, molds and other fields due to its excellent properties such as high hardness, corrosion resistance, oxidation resistance, thermal stability, bonding strength and low friction coefficient, as a surface protection material to extend the service life of workpieces life. [0003] Conventional CrN coatings are generally columnar crystal and nanocrystalline structures, and their surface hardness is 22-25GPa. Compared with multi-component composite coatings with a hardness of generally 30-50GPa, such as TiAlN, CrAlN, TiCrAlN, etc., they have obvious disadvantages. However, its corrosion resistance and high temperature resistance are better. Therefore, if the hardness of the CrN coating is increased, the service life of the coating will...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/02C23C14/06B82Y40/00
CPCB82Y40/00C23C14/0036C23C14/022C23C14/0641
Inventor 吴忠振李体军肖舒刘亮亮林海潘锋
Owner PEKING UNIV SHENZHEN GRADUATE SCHOOL