Welding method and device for large-area ferromagnetic target material

A welding device and ferromagnetic technology, applied in auxiliary devices, welding equipment, auxiliary welding equipment, etc., can solve the problems of target blank edge deformation, difficult welding quality control, uneven thickness, etc., and achieve high thickness uniformity of finished products, Good magnetron sputtering performance, good uniformity effect

Active Publication Date: 2019-04-09
GRIKIN ADVANCED MATERIALS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the conventional brazing process and equipment are difficult to control the welding quality of ferromagnetic thin plate targets, and it is difficult to ensure the welding rate and welding flatness
The main reason is that the target blank is susceptible to slight impact or uneven pressure during the pressurization process.
Due to the thinner ferromagnetic target blank, the target blank is prone to movement, deformation of the target blank part or edge, etc.
Lead to problems such as low welding rate, poor surface flatness and uneven thickness after processing

Method used

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  • Welding method and device for large-area ferromagnetic target material
  • Welding method and device for large-area ferromagnetic target material
  • Welding method and device for large-area ferromagnetic target material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] 1. The permanent magnetic chuck made of heat-resistant magnetic steel is used for target welding.

[0024] 2. Place the permanent magnetic chuck, back plate and target blank on the heating table, turn on the heating controller to heat, and the temperature rises to 180°C.

[0025] 3. Cu alloy back plate, after the back plate is heated on the suction cup, solder is formed in the groove, and the depth of the groove is 0.5mm.

[0026] 4. The ferromagnetic cobalt target blank with a purity of 99.999% has a size of Φ450×3.5. The target blank is heated on the welding table, and the welding surface is coated with solder.

[0027] 5. Fasten the target blank and the back plate slowly, and slowly discharge the air between the joint surfaces during the process.

[0028] 6. Rotate the knob of the permanent magnetic suction cup to make the surface of the suction cup magnetic, so that the cobalt target blank and the back plate are fixed in the groove.

[0029] 7. Turn off the heati...

Embodiment 2

[0032] 1. The permanent magnetic chuck made of heat-resistant magnetic steel is used for target welding.

[0033] 2. Place the permanent magnetic chuck, back plate and target blank on the heating table, turn on the heating controller to heat, and the temperature rises to 200°C.

[0034] 3. After the Cu alloy backplane is heated, an indium pool is formed in the groove, and the depth of the groove is 1mm.

[0035] 4. The ferromagnetic nickel-platinum target blank with a purity of 99.995% has a size of Φ450×3. The target blank is heated on the welding table, and the welding surface is coated with indium material.

[0036] 5. Fasten the target blank and the back plate slowly, and slowly discharge the air between the joint surfaces during the process.

[0037] 6. Turn the knob of the permanent magnetic chuck to make the surface of the chuck magnetic, so that the nickel-platinum target blank and the back plate are fixed in the groove.

[0038] 7. Turn off the heating controller o...

Embodiment 3

[0041] 1. The permanent magnetic chuck made of heat-resistant magnetic steel is used for target welding.

[0042] 2. Place the permanent magnetic chuck, back plate and target blank on the heating table, turn on the heating controller to heat, and the temperature rises to 200°C.

[0043] 3. After the Cu alloy backplane is heated, an indium pool is formed in the groove, and the depth of the groove is 2mm.

[0044] 4. The ferromagnetic nickel-iron target blank with a purity of 99.999% has a size of Φ450×2.5. The target blank is heated on the welding table, and the welding surface is coated with indium material.

[0045] 5. Fasten the target blank and the back plate slowly, and slowly discharge the air between the joint surfaces during the process.

[0046] 6. Rotate the knob of the permanent magnetic suction cup to make the surface of the suction cup magnetic, so that the nickel-iron target blank and the back plate are fixed in the groove.

[0047] 7. Turn off the heating cont...

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PUM

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Abstract

The invention discloses a welding method and device for a ferromagnetic sputtering target material. According the welding method, through the magnetic effect of a permanent magnet chuck platform on the ferromagnetic sputtering target material, the target material, a solder and a backing plate are uniformly combined to improve the welding quality of the large-area ferromagnetic sputtering target material, so that the welded rate of the target material is high and the thickness uniformity of the target material is good. The welding method is easy to operate and has strong repeatability; the high-quality welding of the large-area ferromagnetic sputtering target material can be achieved by using a magnetic platform welding device; and the sputtering performance of the target material is significantly improved.

Description

technical field [0001] The invention belongs to the technical field of sputtering target manufacturing, and relates to a large-area ferromagnetic target welding method and device. Background technique [0002] With the rapid development of a new generation of electronic information technology, mainly including deep nano-semiconductor integrated circuits and new non-volatile storage technologies, more ferromagnetic targets have begun to be used. The modulation work function technology in the 90nm integrated circuit uses a ferromagnetic high-purity cobalt target, and the ultra-high-purity nickel-platinum alloy target is used after the characteristic size of the integrated circuit reaches 65-20nm. Nickel-iron alloy with high saturation magnetization and low coercive force is the key material for perpendicular magnetic recording storage and thin film inductor technology. These ferromagnetic metal sputtering targets containing Fe, Co and Ni have a strong shielding effect on the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K1/00B23K3/00B23K3/08B23K37/04
CPCB23K1/0008B23K3/00B23K3/087
Inventor 罗俊锋郭凤歧徐国进陈淼琴李勇军庞欣熊柏青贺昕刘晓崔佳
Owner GRIKIN ADVANCED MATERIALS
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