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A gradient structure tialsiyn multi-component nano-coating and preparation method thereof

A gradient structure, nano-coating technology, applied in coating, metal material coating process, vacuum evaporation plating, etc.

Active Publication Date: 2020-10-30
SICHUAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Similarly, from the perspective of hardness change alone, no toughening phenomenon was found on the basis of TiAlSiN coating doped with Cr and Y.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Put the cleaned substrate into the vacuum chamber of the multi-target plasma-enhanced cathodic arc plating and magnetron sputtering compound ion coating system, and wait for the back vacuum to reach 5.7×10 -2 At Pa, turn on the auxiliary heating device on the furnace wall to heat the substrate, and at the same time turn on the rotating power supply to make the substrate rotate continuously. After heating for 60 minutes, the temperature of the substrate reaches 345 °C; then pass argon into the vacuum chamber to adjust the flow of argon The guaranteed pressure is 1.8×10 -1 Pa, and then apply a DC bias of -200V and a pulse bias of -350V to the substrate, using ionized Ar + Etch the surface of the substrate, etch for 40 minutes, and the temperature of the substrate rises to 397°C; turn off the bias voltage of the substrate, turn off the argon gas, and feed nitrogen gas in turn, adjust the flow rate of nitrogen gas to ensure that the working pressure is 2.5Pa, and turn on th...

Embodiment 2

[0028] Put the cleaned substrate into the vacuum chamber of the multi-target plasma-enhanced cathodic arc plating and magnetron sputtering compound ion coating system, and wait for the background vacuum to reach 5.0×10 -2 At Pa, turn on the auxiliary heating device on the furnace wall to heat the substrate, and at the same time turn on the rotating power supply to make the substrate rotate continuously. After heating for 50 minutes, the temperature of the substrate reaches 325 °C; then pass argon gas into the vacuum chamber to adjust the flow rate of argon gas The guaranteed pressure is 1.0×10 -1 Pa, and then apply a DC bias of -100V and a pulse bias of -200V to the substrate, using ionized Ar + Etch the surface of the substrate, etch for 30 minutes, and the temperature of the substrate rises to 368°C; turn off the bias voltage of the substrate, turn off the argon gas, and feed nitrogen gas in turn, adjust the flow rate of nitrogen gas to ensure that the working pressure is 1....

Embodiment 3

[0031] Put the cleaned substrate into the vacuum chamber of the multi-target plasma-enhanced cathodic arc plating and magnetron sputtering composite ion coating system, and wait for the back vacuum to reach 5.5×10 -2 At Pa, turn on the auxiliary heating device on the furnace wall to heat the substrate, and at the same time turn on the rotating power supply to make the substrate rotate continuously. After heating for 80 minutes, the temperature of the substrate reaches 377°C; then pass argon gas into the vacuum chamber to adjust the flow rate of argon gas The guaranteed pressure is 2.5×10 -1 Pa, and then apply a DC bias of -200V and a pulse bias of -400V to the substrate, using ionized Ar + Etch the surface of the substrate, etch for 80 minutes, and the temperature of the substrate rises to 415°C; turn off the bias voltage of the substrate, turn off the argon gas, and feed nitrogen gas in turn, adjust the flow rate of nitrogen gas to ensure that the working pressure is 2.6Pa, a...

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Abstract

The invention discloses a gradient structure TiAlSiYN multi-component nano coating composed of an inner sublayer, a middle sublayer and an outer sublayer which are different. The Al contents of the sublayers are gradually reduced from inside to outside, and are (15-20) at.%, (10-15) at.% and (7-10) at.% in sequence; Ti contents of the sublayers are gradually increased from inside to outside and are (28-32) at.%, (32-36) at.% and (36-40) at.% in sequence; and the Si content in each sublayer is (1-3) at.%, the Y content is smaller than 0.1 at.%, and the balance is N. The invention further discloses a preparation method of the gradient structure TiAlSiYN multi-component nano coating. The method comprises the steps that a titanium aluminum target with the high aluminum content, a titanium silicon arc target and a tantalum sputtering target are deposited for a period of time at first; titanium aluminum target with the high aluminum content is closed, a titanium aluminum arc target with themedium aluminum content is opened for deposition for a period of time; and finally the titanium aluminum target with the medium aluminum content is closed, and a titanium aluminum arc target with lowmedium aluminum content is opened for deposition for a period of time. The gradient structure TiAlSiYN multi-component nano coating is firmly combined with a substrate and meanwhile has good toughnessand antifriction performance, and the preparation method is good in controllability, easy to implement and suitable for industrial production and application.

Description

technical field [0001] The invention belongs to the technical field of cutting tool surface coatings, and in particular relates to a preparation method of a TiAlSiYN multi-element nano-coating with a gradient structure. Background technique [0002] The preparation of a hard coating on the surface of the cutting tool can not only further enhance the surface hardness of the tool and resist wear, but the coating often also hinders thermal and chemical diffusion. TiAlSiN coating is a quaternary coating developed by adding a small amount of Si atoms on the basis of TiAlN ternary coating. Si elements often form network nc-Si in the coating 4 N 3 This continuous amorphous phase not only breaks the growth mode of the coating according to the columnar structure, restricts the growth of the wrapped TiAlN grains, refines the grains, but also acts as an interface phase to hinder dislocation movement And crack growth, therefore, TiAlSiN coating often has a high hardness, even has a s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/32C23C14/35C23C14/06C23C14/02
CPCC23C14/0021C23C14/022C23C14/0641C23C14/325C23C14/352
Inventor 鲜广范洪远赵海波
Owner SICHUAN UNIV
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