Hot-arc evaporation multi-cavity nano powder preparation device
A multi-cavity, nano-powder technology, which is applied in the field of thermal arc evaporation multi-chamber nano-powder preparation devices, can solve the problems of insufficient continuity, low production efficiency, and high operating time requirements, so as to reduce the time of vacuuming and avoid The effect of large-scale shutdown and avoidance of mutual contamination
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Embodiment 1
[0045] The hot arc evaporation multi-chamber nano-powder preparation device is equipped with at least two main chamber powder generating units;
[0046] Each main chamber powder generating unit is connected to the vacuum main pipeline 13 through respective vacuum branch pipelines 14, and the vacuum main pipeline is connected to the vacuum pump system 17;
[0047] Each main chamber powder generating unit is connected to the exhaust main pipe 2 through respective exhaust branch pipes 4, and each main chamber powder generating unit is respectively connected to the air intake main pipe 3 through respective air inlet branch pipes 7;
[0048] Each main chamber powder generating unit is connected to the arc power supply and the control system 1 through its own heat arc control signal line and its own feeding control signal line;
[0049] The main chamber powder generating unit includes a main chamber 9 and a heat arc device 6, the top of the main chamber is provided with a heat arc d...
Embodiment 2
[0063] Utilize the device described in embodiment 1 to realize the continuous production method of heat arc evaporation multi-cavity metal nanopowder, comprising the following steps:
[0064] (1) Place the target: Install a single metal or metal alloy target with the same composition or different composition on the anode holder of each independent cavity as the anode, and use a metal with a melting point higher than 3000°C as the cathode, and the metal is tungsten, platinum or molybdenum;
[0065] (2) Vacuuming: Close the hatches of each independent cavity, open the vacuum valves of each independent cavity, and vacuumize all the cavities until the vacuum degree is not higher than 10 -4 Pa, close the vacuum valves of each independent cavity;
[0066] (3) Arcing: Open the intake valves of each independent cavity, introduce 0.2-0.3 atmospheric pressure hydrogen as the working gas, and introduce 50-180V DC voltage between the cathode and the anode, and the anode starts to melt an...
Embodiment 3
[0073] Using the device described in Example 1 to realize the continuous production method of thermal arc evaporation multi-cavity carbon nano powder is the same as in Example 2, the difference is:
[0074] In the step (1), the anode target material is a mixture of different types of carbon and a catalyst, the carbon material is graphite, carbon black or activated carbon, the catalyst is a transition metal or yttrium oxide, and when the catalyst is a transition metal, the carbon nanotube obtained is Multi-walled carbon nanotubes, when the catalyst is yttrium oxide, the obtained carbon nanotubes are single-walled carbon nanotubes, and the atomic ratio of carbon atoms to metal atoms in the carbon material and catalyst mixture is 80-100;
[0075] When preparing carbon nanotubes and carbon nanospheres in the step (3) or step (7), the DC voltage passed in is 50-180V; the DC voltage passed in when preparing nano-graphite is 40-60V, and the discharge current is 90V. -120A;
[0076] ...
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