Multi-layer metal net grid electromagnetic shielding optical window employing femtosecond laser etching and fabrication method thereof

An electromagnetic shielding, multi-layer metal technology, applied in the direction of magnetic/electric field shielding, electrical components, etc., can solve the problem that the metal grid cannot be in the low-frequency electromagnetic band, etc., and achieve high visible and infrared light transmittance, long service life, high transparency Overrate effect

Inactive Publication Date: 2019-05-17
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to solve the problems existing in the prior art, enhance the shielding effect of the transparent electromagnetic shielding light window, realize visible and infrared high transmittance performance, and solve the problem that the existing metal grid cannot cover the low-frequency electromagnetic wave band well, the present invention provides a Femtosecond laser etched multilayer metal grid electromagnetic shielding light window

Method used

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  • Multi-layer metal net grid electromagnetic shielding optical window employing femtosecond laser etching and fabrication method thereof
  • Multi-layer metal net grid electromagnetic shielding optical window employing femtosecond laser etching and fabrication method thereof
  • Multi-layer metal net grid electromagnetic shielding optical window employing femtosecond laser etching and fabrication method thereof

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Embodiment 1

[0038] Embodiment 1: Utilize the electromagnetic shielding light window of the double-layer square metal mesh grid of femtosecond laser etching, such as figure 1As shown, the electromagnetic shielding optical window is composed of a metal grid layer 1 composed of gold, a metal grid layer 2 composed of nickel, a transparent dielectric substrate quartz glass 3, a metal grid layer 4 composed of nickel, and a metal grid layer composed of gold. Metal grid layer 5 constitutes. The period of the metal grid is set to 160um, the line width is set to 8um, the thickness of the nickel layer is 500nm, and the thickness of the gold layer is 1um. The thickness of the transparent medium substrate is set to h, and the value range of h is set to 2mm-12mm.

[0039] The equipment method of the electromagnetic shielding light window of the double-layer square metal mesh grid etched by femtosecond laser is as follows Figure 8 Shown: Place the prepared quartz glass sheet in a mixed solution of ac...

Embodiment 2

[0040] Embodiment 2: Utilize the electromagnetic shielding light window of the three-layer grid metal mesh grid of femtosecond laser etching, such as Figure 7 As shown, the electromagnetic shielding optical window described above is composed of a metal grid layer 1 composed of gold, a metal grid layer 2 composed of nickel, a first layer of transparent dielectric substrate quartz glass 3, a metal grid layer 4 composed of gold, and a metal grid layer 4 composed of nickel. The formed metal grid layer 5, the second transparent dielectric substrate quartz glass 6, the metal grid layer 7 made of nickel and the metal grid layer 8 made of gold are composed. The period of the metal grid is set to 160um, the line width is set to 8um, the thickness of the nickel layer is 500nm, and the thickness of the gold layer is 1um.

[0041] The equipment method of the electromagnetic shielding light window of the double-layer square metal mesh grid etched by femtosecond laser is as follows Figur...

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Abstract

In a multi-layer metal net grid electromagnetic shielding optical window employing femtosecond laser etching, a plurality of transparent dielectric plates etched with metal net grids are laminated, and a conductive metal net grid layer and a ferromagnetic metal net grid layer are etched on a surface of each transparent dielectric substrate from top to bottom. By a femtosecond laser direct-writingdeep-etching processing technology, metal net grid patterns such as lattices, round rings, diamonds and hexagonal shapes are etched on the surfaces of the transparent dielectric substrate coated withphotoresist, a layer of metal nickel or iron ferromagnetic metal thin film is plated on the etched substrate, a layer of gold or silver excellent conductive metal thin film is plated on the nickel layer, the conductive metal thin film is placed in an organic solvent to remove the photoresist and a metal part which is not needed to obtain a metal net grid. The fabricated metal net grid is difficultto scratch and fall off and is long in service lifetime. The ferromagnetic material and the conductive metal material are combined, a shielding effect can be developed at a wide band from a low-frequency electromagnetic band to a high-frequency electromagnetic band, and the multi-layer metal net grid electromagnetic shielding optical window has the characteristics of high electromagnetic shielding and high transmission of visible light and infrared light.

Description

technical field [0001] The invention relates to the technical field of novel transparent electromagnetic interference shielding materials, in particular to a multilayer metal grid electromagnetic shielding light window etched by a femtosecond laser. Background technique [0002] With the development of television, radio, microwave technology and wireless communication technology, electromagnetic pollution not only interferes with precision electronic equipment, but also has a non-negligible negative impact on human health. This invisible and intangible electromagnetic pollution has become the fifth largest pollution after air pollution, water pollution, solid waste pollution and noise pollution. Electromagnetic shielding technology (absorption and reflection) is the main measure to solve electromagnetic pollution. In recent years, electromagnetic interference shielding technology has received widespread attention. In modern society, transparent electromagnetic shielding bod...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05K9/00
Inventor 董红星张亚强张龙姜雄伟牟南历
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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