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AlCrN/MoS2 nanometer composite film with self-lubrication and wear resistance, and preparation method thereof

A nano-composite, wear-resistant technology, applied in the direction of ion implantation plating, metal material coating process, coating, etc., can solve the problems of poor uniformity of component thickness, weak matrix bonding force, etc., and achieve low film friction coefficient, excellent Lubrication performance, effects of wide application prospects

Inactive Publication Date: 2019-05-21
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the film layer coated by the above-mentioned rubbing or bonding method has disadvantages such as poor composition thickness uniformity and weak bonding force with the substrate, and all of them are single MoS 2 The film is applied to the surface of the part

Method used

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  • AlCrN/MoS2 nanometer composite film with self-lubrication and wear resistance, and preparation method thereof
  • AlCrN/MoS2 nanometer composite film with self-lubrication and wear resistance, and preparation method thereof
  • AlCrN/MoS2 nanometer composite film with self-lubrication and wear resistance, and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0036] In this embodiment, AlCrN / MoS is deposited on a single crystal Si wafer (40mm×40mm×0.67mm). 2 film. Deposition was performed using a HiPIMS / DCMS composite magnetron sputtering system. The specific operation steps are as follows:

[0037] (1) The matrix was cleaned with an ultrasonic cleaner in acetone and alcohol solutions for 30 minutes, and then cleaned with high-purity N 2 Blow dry and mount the substrate on a spin stand.

[0038] (2) The AlCr target is connected to a high power pulse power supply (High Power Impulse Magnetron Sputtering), MoS 2 The target is connected to a pulsed DC power supply; the background vacuum of the vacuum chamber is pumped to 3.0×10 -3 Below Pa, and heated to 300°C, then apply -780V bias voltage, flow Ar into the vacuum chamber with a flow rate of 110sccm, adjust the throttle valve to maintain the working pressure at 1.1Pa, and glow clean for 10min; to remove impurities on the surface of the substrate.

[0039] (3) Reduce the Ar flow ...

Embodiment 2

[0050] In this example, AlCrN / MoS is deposited on a SUS304 stainless steel sheet (40mm×40mm×0.99mm) 2 film. Deposition was performed using a HiPIMS / DCMS composite magnetron sputtering system. The specific operation steps are as follows:

[0051] (1) The matrix was cleaned with an ultrasonic cleaner in acetone and alcohol solutions for 30 minutes, and then cleaned with high-purity N 2 Blow dry and mount the substrate on a spin stand.

[0052] (2) The AlCr target is connected to a high-power pulse power supply, MoS 2 The target is connected to a pulsed DC power supply; the background vacuum of the vacuum chamber is pumped to 3.0×10 -3 Below Pa, and heated to 300°C, then apply -785V bias voltage, flow Ar into the vacuum chamber at 150sccm, adjust the throttle valve to maintain the working pressure at 1.2Pa, glow cleaning for 10min; to remove impurities on the surface of the substrate.

[0053] (3) Reduce the Ar flow rate to 65sccm, maintain the bias voltage of -785V, reduce ...

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Abstract

The invention discloses a AlCrN / MoS2 nanometer composite film with self-lubrication and wear resistance, and a preparation method thereof, and belongs to the technical field of film. A high-power pulse and pulse direct-current composite magnetic control coating technology is adopted for preparing the AlCrN / MoS2 nanometer composite film on a tool substrate, in the deposition process, the bias voltage is adjusted to range from minus 50V to minus 150V, and then mixed gas with N2 and Ar is fed in; the working air pressure is kept to range from 0.5Pa to 1.0Pa, AlCr target power is kept to range from 0.5kW to 1.0kW, MoS2 target power is kept to range from 0.05kW to 0.3kW, and the AlCrN / MoS2 nanometer composite film is obtained after deposition. The prepared AlCrN / MoS2 nanometer composite film has the good lubrication performance, abrasion of a substrate material can be remarkably reduced, and the AlCrN / MoS2 nanometer composite film has the good chemical stability and the characteristics thata stripped layer is easy to transfer and the like.

Description

technical field [0001] The invention relates to the field of thin film technology, in particular to a self-lubricating and wear-resistant AlCrN / MoS 2 Nanocomposite film and method for its preparation. Background technique [0002] The rapid development of modern manufacturing industry has higher and higher requirements for hard films. The traditional binary CrN film tools have disadvantages such as high cutting temperature, high friction coefficient and large tool wear during the cutting process, which limit their application. Therefore, the film gradually develops into a multi-component film, and the multi-component hard film has high wear resistance and low friction coefficient, which can improve the cutting life of the film tool and the surface processing quality of the workpiece, and can be widely used in the processing of metal parts and molds. , so adding Al element to the CrN film can form (Al,Cr)N phase solid solution, which plays a role of solid solution strengthen...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/06
CPCC23C14/0036C23C14/0623C23C14/0641C23C14/3485C23C14/35
Inventor 王铁钢蒙德强许人仁刘艳梅阎兵尹照星
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE