Two-stage tubular continuous reaction system for diborane synthesis and synthesis method of diborane
A reaction system and tubular reactor technology, applied in chemical instruments and methods, inorganic chemistry, non-metallic elements, etc., can solve problems such as mixing, hidden dangers, complicated operations and devices, and achieve the effect of increasing the reaction speed.
Active Publication Date: 2019-06-11
包头市海科福鹏电子材料有限公司
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Problems solved by technology
The boiling points of ethane and diborane are very close, and the separation is very difficult, requiring complex operations and devices to achieve
And if diethyl ether complex is not used, boron trifluoride high-pressure gas must be used, which has serious potential safety hazards. In addition, fluorine-based impurities are mixed in the product due to the use of fluorine compounds, and the disposal of waste is also difficult. more complex issues
Method used
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Embodiment Construction
[0063] The system of the present invention is described in detail below in conjunction with the embodiments:
[0064] like figure 1 As shown, one embodiment of the present invention includes the following process. Helium gas with mass purity>99.9% and boron trichloride gas (BCl with mass purity>99.95) 3 ) are respectively passed through two pipelines through a tee and then merged into one pipeline and then supplied to pipeline mixer 1, wherein boron trichloride gas and helium gas are mixed at a mass ratio of 5:1 to obtain a mixed gas. The output pipeline of the mixed gas from the outlet of the pipeline mixer 1 is divided into two pipelines and connected with the primary tubular reactor 2 and the secondary tubular reactor 3 respectively.
[0065] The mixed solvent is fed to the solvent tank 8 for subsequent use by replenishing the fresh solvent pipeline at a speed of 120L / h, and the mixed solvent can be diglyme, triethylene glycol diethylene glycol in a volume ratio of 5:3:2 ...
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The invention provides a two-stage tubular continuous reaction system for diborane synthesis, comprising: a pipeline mixer, a first-stage tubular reactor, a second-stage tubular reactor, a gas-liquidseparator and a cooler, and the cooler is used for receiving a material coming from the upper end of the gas-liquid separator, cooling the material and discharging inert gas from the upper end of thecooler, and a product collected at the lower end of the cooler is a diborane liquid having a purity of more than 98%. Further, the present invention also provides a one-step continuous production process of diborane by using the system. The invention realizes one-step continuous production of the diborane product by modification of the structure of the reaction system, thereby greatly improving the production efficiency, reducing the energy and material waste of the product in a stopping and starting process caused by stopping of the reaction system, extremely well saving cost and increasing production safety.
Description
technical field [0001] The invention belongs to the field of chemical synthesis, and in particular relates to a two-stage tubular continuous reaction system for synthesizing diborane and a synthesis method of diborane. Background technique [0002] Diborane is a gas with a boiling point of -92.5°C, which is highly flammable and can be used as fuel and propellant for rockets. It can also be used as a dopant in semiconductor manufacturing, so it is widely used in semiconductor integrated circuit IC, liquid crystal display LCD, semiconductor light emitting device LED and solar cell PV and other industries. Diborane can also be used as a mixed gas when forming a BPSG (boron, phosphorus, silicon glass) insulating film. When used as a mixed gas, it is necessary to use N 2 , Ar, He, H 2 Use after gas dilution. In addition, it can also be used after being transformed into a stable and easy-to-handle form from higher boranes and amine appendages. In recent years, with the gradual...
Claims
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IPC IPC(8): C01B6/10
Inventor 杨科
Owner 包头市海科福鹏电子材料有限公司