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Intelligent selective sunlight transmission and reflection coating and preparation method thereof

A reflective coating and selective technology, applied in the coating, metal material coating process, sputtering coating, etc., can solve the problems of decreased solar light regulation rate, unfavorable comprehensive performance, complex process, etc., and achieve improved thermal stability Sex and interface binding force, improve thermal stability and work reliability, good thermal stability

Active Publication Date: 2019-06-14
NANJING UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Current reported VO 2 The anti-reflection layer in the coating only has a single function, such as increasing the visible light transmittance, which will lead to a decrease in the solar light regulation rate, and also needs to add a protective layer on the outer surface. The process is complicated, which increases the cost and is not conducive to comprehensive performance optimization

Method used

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  • Intelligent selective sunlight transmission and reflection coating and preparation method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] The background vacuum is 3.0×10 －5 Pa, the working pressure is 1.0Pa, high-purity Ar gas is used as the ion source, the flow rate is 20sccm, O 2 and N 2 gas as a reaction gas.

[0036] First, a metal W film with a thickness of 3nm was deposited on the quartz glass, the sputtering power was 200W, as a diffusion barrier layer, and the substrate temperature was room temperature.

[0037] Inner anti-reflection layer TiO 2 (rutile phase) deposition, TiO deposition by RF reactive sputtering 2 Layer, pass the reaction gas O 2 gas, the substrate temperature is 200°C, the sputtering power is 180W, O 2 The partial pressure is 0.15Pa, and the thickness is 10nm.

[0038] Main dimming layer VO 2 -W, VO deposited by RF co-sputtering 2 -W floor, VO 2 Co-sputtering with W double target, the sputtering power is 180W and 180W respectively, the substrate temperature is 200℃, and the layer thickness is controlled at 20nm. The W molar content is 0.3%.

[0039] Outer anti-reflecti...

Embodiment 2

[0042] The background vacuum is 3.0×10 －5 Pa, the working pressure is 1.0Pa, high-purity Ar gas is used as the ion source, the flow rate is 20sccm, O 2 and N 2 gas as a reaction gas.

[0043] First, a metal W film with a thickness of 5nm was deposited on the quartz glass, the sputtering power was 500W, as a diffusion barrier layer, and the substrate temperature was room temperature.

[0044] Inner anti-reflection layer TiO 2 (rutile phase) deposition, TiO deposition by RF reactive sputtering 2 Layer, pass the reaction gas O 2 gas, the substrate temperature is 300°C, the sputtering power is 250W, O 2 The partial pressure is 0.15Pa, and the thickness is 20nm.

[0045] Main dimming layer VO 2 -W, VO deposited by RF co-sputtering 2 -W floor, VO 2 Co-sputtering with W double target, the sputtering power is 250W and 250W respectively, the substrate temperature is 350℃, and the layer thickness is controlled at 30nm. The W molar content is 2%.

[0046] Outer anti-reflection...

Embodiment 3

[0049] The background vacuum is 3.0×10 －5 Pa, the working pressure is 1.0Pa, high-purity Ar gas is used as the ion source, the flow rate is 20sccm, O 2 and N 2 gas as a reaction gas.

[0050] First, a metal W film with a thickness of 8nm was deposited on the quartz glass, the sputtering power was 200W, as a diffusion barrier layer, and the substrate temperature was room temperature.

[0051] Inner anti-reflection layer TiO 2 (rutile phase) deposition, TiO deposition by RF reactive sputtering 2 Layer, pass the reaction gas O 2 gas, the substrate temperature is 300°C, the sputtering power is 250W, O 2 The partial pressure is 0.15Pa, and the thickness is 40nm.

[0052] Main dimming layer VO 2 -W, VO deposited by RF co-sputtering 2 -W floor, VO 2 Co-sputtering with W double target, the sputtering power is 300W and 300W respectively, the substrate temperature is 350℃, and the layer thickness is controlled at 30nm. The W molar content is 2%.

[0053] Outer anti-reflection...

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Abstract

The invention discloses an intelligent selective sunlight transmission and reflection coating and a preparation method thereof. The intelligent selective sunlight transmission and reflection coating is characterized by sequentially comprising a substrate layer, a diffusion barrier layer, an inner anti-reflection layer, a main dimming layer and an outer anti-reflection layer; wherein the diffusionbarrier layer is a metal W film, the inner anti-reflection layer is rutile-phase TiO2, the main dimming layer is a VO2-W, and the outer anti-reflection layer is anatase TiO2-N; and the thickness of the diffusion barrier layer and the inner anti-reflection layer, the main dimming layer and the outer anti-reflection layer are 3-8 nm, 10-50 nm, 20 -80 nm and 30-60 nm correspondingly. The coating is prepared by adopting a multi-target reactive radio reactive sputtering method. According to the coating, the two different anti-reflection layers are designed, and the outer anti-reflection layer witha gradient structure not only improves the visible light transmittance and promotes the sunlight adjustment rate, but also has the effects of protecting the coating and self-cleaning. The preparationmethod has the advantages of simple operation, good repeatability, cleanness, no pollution and good realization effect. The VO2-based high-efficiency solar adjustable coating can be widely used in thefield of intelligent window buildings.

Description

technical field [0001] The invention relates to an intelligent selective sunlight transmission and reflection coating and its preparation method, in particular to an intelligent energy-saving composite coating with adjustable near-infrared light and its preparation method, which can be widely used in building "smart windows" . technical background [0002] my country's building energy consumption accounts for about 26% of the total energy consumption of the society, of which about 50% is due to the low energy-saving effect of building glass. Improving the energy-saving efficiency of glass doors and windows is one of the important ways to reduce building energy consumption. There are three main factors affecting the loss of architectural glass: infrared radiation, permeable solar radiation and heat transfer coefficient. Reducing solar radiation can reduce the heat transfer coefficient at the same time, and the heat transfer can also be reduced by insulating glass. At presen...

Claims

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Application Information

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IPC IPC(8): C23C14/18C23C14/34C23C14/08C23C14/58
Inventor 操振华
Owner NANJING UNIV OF TECH
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