Back segment technology for improving reliability performance of compound semiconductor device
A technology of semiconductors and compounds, which is applied in the field of back section technology, can solve the problems of increasing device grounding resistance, large porosity at the edge of the hole, and process complexity, etc., and achieve the effect of reducing grounding resistance, reducing process cost, and simple equipment requirements
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[0028] The present invention will be further explained below in conjunction with the accompanying drawings and specific embodiments.
[0029] refer to figure 1 , a back-stage process for improving the reliability performance of a compound semiconductor device includes the following steps:
[0030] Step 1: Provide a compound semiconductor wafer 1 that has completed part of the device manufacturing process. The front side of the wafer 1 is provided with a metal wiring layer 2. The wafer 1 has a back hole 11 that runs through the front side and the back side. The back hole 11 exposes the Metal connection layer 2. Specifically, the wafer 1 can be a GaN or SiC wafer, and the front-side process of the device is completed, including device isolation, ohmic contact, gate metal, interconnection metal, final passivation layer, etc., so that a metal wiring layer 2 is provided on the front side; the back-side process of the device is completed , including bonding, thinning, via etching,...
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