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Infrared focal plane array detector with DLC protection film and preparation method thereof

An infrared focal plane and array detector technology, applied in the field of infrared focal plane array, can solve problems such as poor picture quality, increased production costs, and reduced product service life

Active Publication Date: 2019-06-25
YANTAI RAYTRON TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, although the commonly used infrared anti-reflection coatings (such as ZnSe, ZnS, etc.) have excellent anti-reflection properties, their mechanical strength is low, and they are easy to be used in the production of detector vacuum sealing windows (especially in the assembly and debugging stages of components and cores). ) and the process of use (infrared focal plane array detectors are mostly used in extreme environments) to form scratches, wear or corrosion, which may cause damage to the anti-reflection coating of the window and reduce the transmittance of infrared radiation, which will further lead to a decrease in the performance of the detector or a decrease in the image quality. The quality deteriorates, which will lead to the failure of the detector components, increase the production cost and reduce the service life of the product

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  • Infrared focal plane array detector with DLC protection film and preparation method thereof
  • Infrared focal plane array detector with DLC protection film and preparation method thereof
  • Infrared focal plane array detector with DLC protection film and preparation method thereof

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preparation example Construction

[0029] The invention provides a method for preparing an infrared focal plane array detector with a DLC protective film, which includes the following steps:

[0030] A) Wash the windows of the infrared focal plane array detector with acetone and working fluid in sequence;

[0031] B) Put argon gas into the window of the cleaned infrared focal plane array detector under vacuum conditions to perform radio frequency plasma cleaning;

[0032] C) Then enter the carbon source gas, and use the radio frequency plasma enhanced chemical vapor deposition method to deposit a DLC protective film on the surface of the window of the infrared focal plane array detector to obtain an infrared focal plane array detector with DLC protective film;

[0033] The radio frequency power in the step C) is 100~2500W, and the vacuum degree in the step C) is 3×10 -3 ~3×10 - 5 Pa.

[0034] The infrared focal plane array detector absorbs infrared waves for imaging. In the terminal use scene, the detector will be equipp...

Embodiment 1

[0053] Cleaning the substrate: Use acetone to clean under ultrasound for 5 minutes to remove surface oil, then use acetone working fluid to clean under ultrasound for 5 minutes, and then repeatedly rinse with deionized water for 10 minutes to remove surface impurities. Spin dry in a spin dryer, and immediately put the washed window on the pole plate of the vacuum chamber to vacuum.

[0054] Deposition of DLC film: when the vacuum reaches the set value of 0.0013Pa, argon is introduced, the flow of argon is 30Sccm, and the RF power is adjusted to 300W for argon ion cleaning.

[0055] Then pass the carbon source gas CH 4 , Set the RF power to 300W, the cavity temperature to be 200℃, the substrate bias to 250v, and the vacuum to be 3×10 -3 Pa, the carbon source gas flow rate is 60 sccm, and the DLC film is deposited.

[0056] After the deposition is completed, turn off the radio frequency power supply, stop the introduction of carbon source gas, increase the flow of argon gas, release th...

Embodiment 2

[0058] Cleaning the substrate: Use acetone to clean under ultrasound for 10 minutes to remove surface oil, then use acetone working fluid to clean under ultrasound for 20 minutes, and then repeatedly rinse with deionized water for 10 minutes to remove surface impurities. Spin dry in a spin dryer, and immediately put the washed window on the pole plate of the vacuum chamber to vacuum.

[0059] Deposition of DLC film: When the vacuum reaches the set value of 0.13Pa, argon is introduced, the argon flow rate is 90 Sccm, and the RF power is adjusted to 300W for argon ion cleaning.

[0060] Then pass the carbon source gas CH 4 , Set RF power to 300W, cavity temperature 175℃, substrate bias, vacuum degree 5×10 -4 Pa, the carbon source gas flow rate is 40 sccm, and the DLC film is deposited.

[0061] After the deposition is completed, turn off the RF power supply, stop the introduction of carbon source gas, adjust the flow of argon gas, release the vacuum, and take out the product.

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Abstract

The invention provides a preparation method for an infrared focal plane array detector with a DLC protection film. The method comprises the following steps: A) the window of the infrared focal plane array detector is cleaned by adopting acetone and a working fluid sequentially; B) argon is supplied to the cleaned window of the infrared focal plane array detector in a vacuum condition, and radio frequency plasma cleaning is carried out; C) a carbon source gas is then supplied, a radio frequency plasma enhanced chemical vapor deposition method is adopted to deposit a DLC protection film on the surface of the window of the infrared focal plane array detector, and the infrared focal plane array detector with the DLC protection film is obtained, wherein the radio frequency power in the step C)is 100 to 2500 W, and the vacuum degree in the step C) is 3*10<-3> to 3*10<-5> Pa. The invention also provides an infrared focal plane array detector with a DLC protection film.

Description

Technical field [0001] The invention belongs to the technical field of infrared focal plane arrays, and particularly relates to an infrared focal plane array detector with a DLC protective film and a preparation method thereof. Background technique [0002] Since entering the 21st century, the development of infrared thermal camera technology has gone through more than 30 years. Its development has evolved from the original mechanical scanning mechanism to the current all-solid miniaturization and all-electronic scanning staring camera, especially non-cooling technology. The development of infrared thermal camera technology has expanded from the long-term main military purpose to such as industrial detection and temperature control, law enforcement and anti-narcotics, safety and precautions, medical and health, remote sensing, equipment early fault diagnosis and maintenance, maritime rescue, astronomical detection, vehicles, flying chess The driver of the ship is also a broad civ...

Claims

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Application Information

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IPC IPC(8): G01J5/20
Inventor 陈文礼战毅孙俊杰孙传彬张磊
Owner YANTAI RAYTRON TECH
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