Device for producing high-purity boron trichloride and production method of device

Abstract

The invention belongs to a device for producing high-purity boron trichloride and a production method of the device. The device comprises a raw material liquid buffering tank, a product tank, a liquidammonia storage tank and a circulating water recycling pool. The raw material liquid buffering tank is connected with a first raw material liquid inlet in the upper middle portion of a first rectification tower through a raw material liquid pump, a liquid phase outlet in the bottom of the first rectification tower is connected with a first raw material liquid inlet of a second rectification tower, and a top gas phase outlet of the second rectification tower is sequentially connected with a product tank through a first tube pass inlet of a second heat exchanger, a first tube pass outlet of a second heat exchanger, a first tee joint and a product pump in sequence. The device has the advantages that the automation degree is high, operation is stable, and the product purity reaches the high-purity grade of 99.9995%. Study of special gas of the electron industry and development of the field of semiconductors are guaranteed, and good economic and social benefits are achieved.

Description

technical field [0001] The invention belongs to the technical field of high-purity boron trichloride production, and specifically relates to a device and a production method thereof capable of producing high-purity boron trichloride with a purity not lower than 99.9995%. Background technique [0002] Boron trichloride is mainly used as dopant gas, crystal growth gas, plasma etching gas, ion beam etching gas, ion implantation gas, etc. in the semiconductor field. In other fields, it can also be used as a catalyst for organic synthesis, as a flux for silicate decomposition, for boriding steel, as an oxygen scavenger, as an additive for nitrides and carbides in alloy refining. [0003] At present, the purification production process of industrially producing boron trichloride has the following methods: [0004] (1) Using borax as raw material, in a rotary furnace, mix borax Na2B4O7·H2O with residual oil, heat to 1038°C, then react with chlorine gas in a special reactor, contro...

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Problems solved by technology

[0005] (2) Mix borax and charcoal, heat to 600-700°C, and feed chlorine gas to react with it to produce boron trichloride. The boron trichloride produced by this method also contains carbonyl dichloride, which requires the help of Thermal decomposition, discharge decomposition and other methods to remove, and the process is complicated

But boron trifluoride is expensive in the raw material of this method, and the cost is high

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