Preparation of tio by a low temperature metastable fluidization process x c y no z Systems and methods for coatings and composite coatings thereof
A composite coating and steady flow technology, which is applied in the direction of coating, metal material coating process, gaseous chemical plating, etc., can solve the problems of high raw material cost, deterioration of matrix performance, grain growth, etc., and achieve widening range, The effect of temperature reduction and cost reduction
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Embodiment 1
[0040] combine figure 1 , the low temperature metastable fluidization process in this example prepares TiO x C y N z The coating and its composite coating system include reducing agent feeding device 1, inert powder feeding device 2, TiCl 4 Gas supply device 3, first metastable flow reactor 4, purification device 5, second metastable flow reactor 6, matrix 7, powder recovery bin 8, condensation recovery device 9;
[0041] The outlet at the bottom of the reducing agent feeding device 1 is connected to the inlet of the first metastable flow reactor 4 through a pipeline and a material valve; the outlet of the inert powder feeding device 2 is connected through a pipeline And the feed valve is connected with the feed inlet of the first metastable flow reactor 4; the TiCl 4 The inlet of the gas supply device 3 is connected with hydrogen and inert gas pipelines through pipelines and gas valves; the TiCl 4 The gas outlet of the gas supply device 3 is connected with the gas inlet ...
Embodiment 2
[0045] This example uses the low-temperature metastable fluidization process in the above-mentioned example 1 to prepare TiO x C y N z The coating and its composite coating specifically include the following steps:
[0046] The reducing agent in the reducing agent feeding device 1 and the inert powder in the inert powder feeding device 2 enter the first metastable flow reactor 4; hydrogen and inert gas enter the TiCl 4 Carry TiCl after gas supply device 3 4 Entering the first metastable flow reactor 4, the reducing agent and the inert powder react in a medium inert atmosphere; the product of the first metastable flow reactor 4 enters the purification device 5 through a material valve, and is purified Then enter the second metastable flow reactor 6 through the pipeline and material valve; the inert gas is mixed with one or more of nitrogen source gas, carbon source gas and oxygen and enters the second metastable flow reactor 6; The product of the first metastable flow react...
Embodiment 3
[0048] This implementation example is based on the above implementation example 2, the reducing agent in the reducing agent feeding device 1 is coarse titanium sponge particles; the TiCl 4 The carrier gas in the gas supply device 3 is H 2 Mixed gas with Ar, H 2 Ratio to Ar (H 2 / Ar) is 0.5, the fluidization gas velocity of the first metastable flow reactor 4 is 0.9 times the minimum fluidization gas velocity, the temperature of the first metastable flow reactor 4 is 400°C, and the time is 180min The temperature room temperature in the purification device 5, the pressure is standard atmospheric pressure, and the purification time is 10min; the temperature of the second metastable flow reactor 6 is 300 ° C, and the gas in the second metastable flow reactor 6 It is argon, and the gas velocity of argon is 0.3 times of the minimum fluidization gas velocity. The substrate 7 is ordinary glass, and the Ti coating is obtained after 8 hours of deposition. figure 2 It is the SEM pict...
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