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Micro sensor chip and preparation method thereof, gas detection method and application

A gas detection and sensor chip technology, applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problems of information dispersion, single function, poor portability, etc., to reduce heat dissipation, improve reliability, and easily expand production Effect

Active Publication Date: 2022-07-22
CHINA PETROLEUM & CHEM CORP +2
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a micro-sensing chip and its preparation method, gas detection method and application in order to overcome the problems of traditional dangerous / combustible gas sensing equipment in the prior art, such as single function, scattered information, and poor portability. , the micro-sensing chip has the advantages of small power, small size, fast response, simple preparation method, high accuracy and reliability, etc., which makes up for the lack of real-time detection and cross-calibration of traditional gas detection instruments. Stable and sensitive response to multi-dimensional parameters of toxic and harmful gas concentration, ambient temperature and humidity in confined spaces such as districts and hazardous chemical warehouses

Method used

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  • Micro sensor chip and preparation method thereof, gas detection method and application
  • Micro sensor chip and preparation method thereof, gas detection method and application
  • Micro sensor chip and preparation method thereof, gas detection method and application

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preparation example Construction

[0088] As the preparation method of the above-mentioned gas sensing material, for example, a hydrothermal method, a sol-gel method, and the like can be used. As a hydrothermal method to prepare a gas sensing material, the metal compound can be dissolved into a solution, the obtained solution is stirred and evaporated to dryness to obtain powder, and the gas sensing material is obtained after grinding and sintering.

[0089] As a method of loading the gas-sensitive sensing material on the electrode layer to form a sensing layer, the gas-sensing sensing material can be dissolved in an appropriate solvent and then loaded on the electrode layer by dripping, spraying, etc. Can. Before use, the chip loaded with the gas sensing material is preferably heat-treated, for example, it can be heated at 30-50° C. for 10-15 hours, for example, heated at 40° C. for 12 hours.

[0090] In the present invention, the thickness of the sensing layer is preferably 1-3 μm, more preferably 1.5-2.5 μm...

Embodiment 1

[0123] A micro-sensor chip with 3 micro-sensor modules is prepared by the following method:

[0124] 1) P-type (100) single crystal silicon wafer with double-sided polishing of 500nm silicon oxide on both sides with a thickness of 500μm (its silicon oxide layer, silicon layer and silicon oxide layer are used as the substrate layer 7, the suspended layer 6 and the support respectively. Layer 5) On the front side, a metal heating wire and a heating electrode connected to the heating wire are prepared as the heating layer 4 by photolithography and vacuum evaporation. Photolithography conditions: use AZ6130 photoresist, exposure time is 8 seconds; vacuum evaporation conditions: vacuum degree is 5 × 10 -7 Below m bar, the vapor deposition rate of Au is 1 A / s, and the vapor deposition rate of Cr is 0.1 A / s. The finally obtained Cr / Au layer of the heating layer (wherein Cr is used as the adhesion layer, with a content of 99.9% by mass) has a thickness of 4 nm; the heating layer 4 in...

Embodiment 2

[0141] Micro-sensing chips were prepared by the method of Example 1, and three kinds of nano-gas-sensing particles prepared by hydrothermal method were respectively loaded on the electrode layers of three micro-sensing modules, and the labels were 1 and 2 respectively. , 3. Wherein, the symbol 1 is the nano-tin oxide particles prepared by the hydrothermal method (the preparation method is carried out according to the nano-tin oxide particles doped with Pd in ​​Example 1, the difference is that Pd is not loaded); the symbol 2 is the nano-oxide prepared by the hydrothermal method Tungsten particles (the preparation method is carried out according to the Pd-doped nano-tin oxide particles in Example 1, the difference is that Pd is not loaded, and WO of the same quality is used 3 instead of SnO 2 ), the symbol 3 is the nano tungsten oxide particles doped with 0.5 mass % palladium prepared by hydrothermal method (the preparation method is carried out according to the nano tin oxide...

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Abstract

The invention relates to the technical field of gas sensors, in particular to a micro sensor chip, a preparation method thereof, a gas detection method and applications. The micro-sensor chip is provided with more than one sensing unit, and the sensing unit includes a sensing layer, an electrode layer, an insulating layer, a heating layer, a supporting layer, a suspended layer and a substrate layer stacked in sequence, wherein the sensing unit is The sensing layer is composed of gas-sensing sensing materials that respond to one or more gas signals; the heating layer is used to heat the electrode layer and the sensing layer; The region corresponding to the heating layer has through holes. The low-power consumption micro-suspension heating plate and the micro-sensor chip of the transition metal oxide gas-sensing material array provided by the present invention have the advantages of low power consumption, high reliability, high response sensitivity, short response time, etc., and can be used for testing benzene , NO X , CO, H 2 S and other gas concentrations are beneficial to improve the selectivity of the gas sensor.

Description

technical field [0001] The invention relates to the technical field of gas sensors, in particular to a micro sensor chip, a preparation method thereof, a gas detection method and applications. Background technique [0002] In recent years, there have been many major fire and explosion accidents in the petrochemical industry at home and abroad, such as the fire and explosion of the Buncefield Oil Depot and the fire accident of the Tenglong Aromatics Storage Tank Area. The occurrence of these accidents is that the leakage of combustible materials was not detected for the first time. lead to further expansion of the accident. As countries and enterprises attach importance to the detection of various toxic and harmful gases, higher requirements are put forward for the detection breadth and accuracy of gas sensors. At present, the core sensing elements of traditional gas detectors commonly used in petroleum, chemical and other fields mainly have problems such as poor portability...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/12
CPCG01N27/128G01N27/127
Inventor 赵宇鑫牟善军梁文杰刘全桢霍子扬苏悦王林
Owner CHINA PETROLEUM & CHEM CORP
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