Flexible base composite substrate and preparation method thereof
A composite substrate and flexible technology, which is applied in semiconductor/solid-state device manufacturing, photovoltaic power generation, electrical components, etc., can solve the problem of not being able to take into account the physical properties and flexibility of the device, achieve good flexibility and ductility, and the preparation method is simple , the effect of good flexibility
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Embodiment 1
[0032] A flexible base composite substrate, the composite substrate comprises a layer of flexible organic polymer layer 1 made of polydimethylsiloxane, the thickness of which is 10 μm, and bonded and cured to form a whole The silicon single crystal slice 2 has a thickness of 0.5 μm.
[0033] A method for preparing a flexible matrix composite substrate as described above, the preparation method comprising the following steps:
[0034] (S.1) Spin coating: Mix polydimethylsiloxane toluene solution with a solid content of 90% and Dow Corning Sylgard184 curing agent at a mass ratio of 10:1, and then spin coat on a glass substrate to form a flexible film;
[0035] (S.2) Semi-curing: Curing the flexible film at 50°C for 30 minutes to a semi-cured state;
[0036] (S.3) Composite curing: transfer the single crystal sheet to the surface of the semi-cured flexible film, continue to cure for 30 minutes until it is completely cured, and peel it off from the glass substrate to obtain a fle...
Embodiment 2
[0039] A flexible matrix composite substrate, said composite substrate comprising a flexible organic polymer layer (1) made of polyethylene terephthalate, the thickness of which is 25 μm, bonded and cured The magnesium oxide single crystal flake 2 as a whole has a thickness of 10 μm.
[0040] A method for preparing a flexible matrix composite substrate as described above, the preparation method comprising the following steps:
[0041] (S.1) Spin coating: mix polyethylene terephthalate tetrahydrofuran solution with a solid content of 50% and polyisocyanate curing agent at a mass ratio of 20:1, and then spin coat on a glass substrate to form a flexible film;
[0042] (S.2) Semi-curing: Curing the flexible film at 120°C for 2 minutes to a semi-cured state;
[0043] (S.3) Composite curing: transfer the single crystal sheet to the surface of the flexible film in a semi-cured state, continue to cure for 3 minutes until it is completely cured, and peel it off from the glass substrat...
Embodiment 4
[0053]A flexible base composite substrate, said composite substrate includes a flexible organic polymer layer 1 made of polytetrafluoroethylene, the thickness of which is 100 μm and a PZT single crystal sheet that is bonded and cured to form a whole 2. Its thickness is 30 μm.
[0054] A method for preparing a flexible matrix composite substrate as described above, the preparation method comprising the following steps:
[0055] (S.1) Spin coating: Mix polytetrafluoroethylene emulsion with a solid content of 70% and polyisocyanate curing agent at a mass ratio of 20:1, and then spin coat on a glass substrate to form a flexible film;
[0056] (S.2) Semi-curing: Curing the flexible film at 300°C for 20 minutes to a semi-cured state;
[0057] (S.3) Composite curing: transfer the single crystal sheet to the surface of the semi-cured flexible film, continue to cure for 30 minutes until it is completely cured, and peel it off from the glass substrate to obtain a flexible matrix compos...
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Abstract
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