Preparation method for nanometer film on surface of metal substrate by plasma chemical vapor deposition

Abstract

The invention discloses a preparation method for a nanometer film on the surface of a metal substrate by plasma chemical vapor deposition. The preparation method includes the following steps of (1) pretreatment; (2) plasma gas activating treatment; (3) film coating; (4) purification; and (5) aftertreatment, wherein in the pretreatment, a compound organic solution is adopted to infiltrate and cleanthe metal substrate to form an organic protective film on the surface of the metal substrate, and the main organic components in the compound organic solution and film coating materials in the thirdstep belong to the same class of polymer organic materials with similar structures; and during purification, vacuum breaking is conducted in the interior of a reaction chamber. The surface of the metal substrate is coated with the nanometer film by the plasma chemical vapor deposition method, compared with existing traditional physical and chemical methods such as passivation solution soaking, treatment solution surface spraying / soaking and re-anodizing treatment, high-efficiency film coating can be achieved in a short time, the performance of the nanometer film is good, centralized treatment of tail gas can be achieved, and environmental friendliness is achieved.

Description

technical field [0001] The invention relates to the technical field of plasma-enhanced chemical vapor deposition coating, in particular to a method for preparing a plasma chemical vapor deposition nano-film on the surface of a metal substrate. Background technique [0002] The surface of metal substrate products is generally treated by anodic oxidation and other processes, and a layer of metal oxide protective film will be formed on the surface. This protective film will protect the metal substrate from external water vapor and other substances to a certain extent. corrosion resistance. However, due to differences in product quality control during the production process, it is easy to cause uneven thickness of the anodized film. At the same time, if laser engraving of the trademark is required, the anodized film layer on the surface of the metal substrate will be loose. Even carving through the anodized film layer causes the metal substrate to be directly exposed to the ext...

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Problems solved by technology

There are some shortcomings in this method: 1) It is not environmentally friendly: because most of the passivation solution contains inorganic metal ions, especially chromium ions, the post-treatment of the passivation solution will bring subsequent environmental protection problems such as water pollution; 2) The operation time is long : After soaking in the passivation solution, the product needs to be dried and left to stand, and it takes a long time to stand still to form a good passivation film, usually for 1-8 hours; 3) The passivation solution will More or less colored, when the product is soaked in the passivation solution, the color of the passivation solution may be brought to the surface of the product, causing the color difference of the product appearance; 4) Organic passivation solution: organic passivation solution in In terms of environmental protection, although it is not as polluting as the inorganic passivation solution, its passivation effect is not as ideal, and after the product is soaked in the organic passivation solution, it takes a long time to dry. After drying, it is easy to leave marks on the product surface and affect the product. Appearance; 5) The subsequent cost of passivation solution treatment is high: the concentration of passivation solution will change with the increase of the number and frequency of use. At this time, it is necessary to continuously monitor the concentration of passivation solution and replenish new passivation solution to maintain Its concentration level, long-term use, will also increase production time and production costs

[0004] Some existing remedial methods include surface spraying / immersion treatment solution and re-anodizing treatment, all of which are traditional physical and chemical methods, which have problems such as long production process time, high cost, insufficient adhesion, unstable quality, and poor environmental friendliness

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