Implantable flexible probe electrode having high-density electrode points and preparation method thereof

Abstract

The invention provides an implantable flexible probe electrode having high-density electrode points and a preparation method thereof. The electrode includes polymer insulating layers and metal layers.The polymer insulating layers and the metal layers are laminated in order from bottom to top to form an electrode structure consisting of a plurality of the polymer insulating layers and a pluralityof the metal layers, with each metal layer being covered between the polymer insulating layers and the metal layers arranged at intervals being electrically insulated. The upper and lower surfaces, and one or two side surfaces of the electrode are provided with electrode points, and surface electrode points and side surface electrode points are formed on the electrode. A design scheme that the electrode points are distributed on the side surface(s) is provided, and the electrode points are arranged on the upper surface, the lower surface and the side surface(s) of the electrode. Compared withcommon surface electrode points, the side electrode point distribution manner achieves a higher electrode point density.

Description

technical field [0001] The invention relates to a flexible probe implantable bioelectrode used in the technical field of biomedical engineering, in particular to an implantable high-density electrode point flexible probe electrode and a preparation method. Background technique [0002] Brain-computer interface technology provides a way for the brain to communicate with the outside world. It bypasses peripheral nerves and muscle tissue, and directly transmits brain signals to the outside world through artificial means or transmits external information to the brain through stimulation. Based on this method, some patients with physical disabilities, muscle atrophy, or paralysis caused by peripheral nerve damage can directly read the electrical signals of the brain through the brain-computer interface to achieve neural connections or connect with external auxiliary equipment to regain motor and sensory functions. . [0003] In the 1970s and 1980s, Benabid, a neurosurgeon at the...

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Problems solved by technology

Compatibility with MEMS technology makes the processing of such silicon-based electrodes highly controllable and repeatable, but the relatively high Young's modulus of silicon relative to biological tissue will cause peripheral nerve signals to decline during long-term embedding. Tissue necrosis, in addition, silicon-based neural probes are prone to fracture after being subjected to tangential stress

[0005] In recent years, thanks to the development of biocompatible polymers and their processing technology, electrodes based on flexible thin films have been realized, such as those mentioned in the article "Polymer Neural Interface with Dual-Sided Electrodes for Neural Stimulation and Recording" by Angela Tooker et al. Flexible film probe based on polyimide, this electrode uses polyimide as the substrate of the electrode, the modulus is two orders of magnitude less than that of the silicon substrate, so it has better biocompatibility and is more stable in long-term implantation. It has advantages, but because the precision of polymer processing technology is far less than that of silicon-based technology, it is impossible to make high-density electrode points on the surface of flexible polymers through traditional processing technology like silicon-based electrodes.

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