Low-loss and low-thermal-expansion magnesium-aluminum-silicon-based glass-ceramic material and preparation method thereof

A low thermal expansion, glass-ceramic technology, applied in the field of electronic ceramic materials, can solve the problems of mismatched thermal expansion coefficient, large signal transmission delay, poor matching of silicon chips, etc., to achieve high density, increase signal transmission speed, reduce The effect of low energy consumption

Active Publication Date: 2019-10-18
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The present invention aims at the problems of thermal expansion coefficient mismatch, high dielectric constant, large dielectric loss and high sintering temperature in the existing ceramic materials in the background technology, resulting in poor matching with silicon chips, large signal transmission delay and

Method used

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  • Low-loss and low-thermal-expansion magnesium-aluminum-silicon-based glass-ceramic material and preparation method thereof
  • Low-loss and low-thermal-expansion magnesium-aluminum-silicon-based glass-ceramic material and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] According to the formula MgO is 11wt%, CaO is 1wt%, Al 2 o 3 29wt%, SiO 2 49wt%, ZrO 2 9wt%, B 2 o 3 1wt%, accurately calculate the weight of the corresponding raw materials, after accurate weighing, ball mill for 2 to 4 hours to make it evenly mixed; after drying, put the mixture in a crucible to melt, heat up to 1550°C for 1 hour, and melt completely Finally, pour the molten solution into deionized water and water quench to obtain transparent and uniform glass slag; then wet the obtained glass slag through wet ball milling, dry to obtain glass powder, use deionized water and zirconium balls as the medium ball mill for 6 hours, dry, After sieving, a uniformly dispersed powder is obtained; after the powder is granulated and pressed, it is sintered at 900°C and kept for 1 hour to obtain a low-loss and low-thermal-expansion magnesium-aluminum-silicon-based glass-ceramic material.

[0022] The low-loss and low-thermal-expansion magnesium-aluminum-silicon-based glass-c...

Embodiment 2

[0024] According to the formula MgO is 13wt%, CaO is 2wt%, Al 2 o 3 27wt%, SiO 2 48wt%, ZrO 2 8wt%, B 2 o 3 2wt%, accurately calculate the weight of the corresponding raw materials, after accurate weighing, ball mill for 2 to 4 hours to make it evenly mixed; after drying, put the mixture in a crucible to melt, heat up to 1550°C for 1 hour, and melt completely Finally, pour the molten solution into deionized water and water quench to obtain transparent and uniform glass slag; then wet the obtained glass slag through wet ball milling, dry to obtain glass powder, use deionized water and zirconium balls as the medium ball mill for 6 hours, dry, After sieving, a uniformly dispersed powder is obtained; after the powder is granulated and pressed, it is sintered at 925°C and kept for 1 hour to obtain a low-loss and low-thermal-expansion magnesium-aluminum-silicon-based glass-ceramic material.

[0025] The low-loss and low-thermal-expansion magnesium-aluminum-silicon-based glass-c...

Embodiment 3

[0027] According to the formula MgO is 15wt%, CaO is 3wt%, Al 2 o 3 25wt%, SiO 2 47wt%, ZrO 2 7wt%, B 2 o 3 3wt%, accurately calculate the weight of the corresponding raw materials, after accurate weighing, ball mill for 2 to 4 hours to make it evenly mixed; after drying, put the mixture in a crucible to melt, heat up to 1500°C for 1.5 hours, and melt completely Finally, pour the molten liquid into deionized water and water quench to obtain transparent and uniform glass slag; then wet the obtained glass slag through wet ball milling, dry to obtain glass powder, use deionized water and zirconium balls as the medium ball mill for 7 hours, dry, After sieving, a uniformly dispersed powder is obtained; after the powder is granulated and pressed, it is sintered at 925° C. and kept for 1.5 hours to obtain a low-loss and low-thermal-expansion magnesium-aluminum-silicon-based glass-ceramic material.

[0028] The low-loss and low-thermal-expansion magnesium-aluminum-silicon-based g...

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Abstract

The invention provides a low-loss and low-thermal-expansion magnesium-aluminum-silicon-based glass-ceramic material and a preparation method thereof, and belongs to the field of electronic ceramic materials. A glass ceramic is prepared from the following components in percentage by weight: 10-20% of MgO, 20-30% of Al2O3, 45-50% of SiO2, 5-10% of ZrO2, 1-5% of B2O3, and 1-5% of CaO. The glass ceramic prepared at the low temperature of 900-950 DEG C has the characteristics that the low dielectric constant is 5.2-6.2 (@1MHz), the low dielectric loss is 5-20*10<-4> (@1MHz), the high bending strength is 140-190 MPa, the high Young modulus is 80-100 GPa, and the low thermal expansion coefficient is 2.5-4.5*10<-6> /DEG C, the glass ceramic is used for ultra-large-scale integrated circuit packaging, signal transmission delay can be significantly reduced, power consumption is lowered, the glass ceramic is matched with a silicon chip well, the whole preparation technological process is simple, the raw material source is rich, and the glass ceramic is of great significance to industrial production.

Description

technical field [0001] The invention belongs to the field of electronic ceramic materials, and relates to a low-loss and low-thermal-expansion magnesium-aluminum-silicon-based glass-ceramic material and a preparation method thereof; the material is suitable for ultra-large-scale integrated circuit packaging. Background technique [0002] In recent years, the rapid development of information technology has promoted the ultra-large-scale and multi-functionalization of integrated circuits, and promoted the development of packaging technology in the direction of advanced high-density packaging. Packaging materials are an important part of it, and the rapidly developing low-temperature co-firing Ceramics (LTCC) have attracted great attention. MgO-Al 2 o 3 -SiO 2 It is a glass-ceramic, which has the characteristics of large sintering temperature range, low sintering temperature, high bending strength, low thermal expansion coefficient, and excellent low-frequency dielectric pro...

Claims

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Application Information

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IPC IPC(8): C03C10/08C03B32/02
CPCC03C10/0045C03B32/02
Inventor 李波夏奇张树人
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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