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High-speed superconductive nanowire single-photon detector integrating impedance matching structure

A single-photon detector and superconducting nanowire technology, which is used in photometry, photometry, and optical radiation measurement using electrical radiation detectors to achieve the effects of reducing noise, increasing rising edge slope, and increasing kinetic energy inductance.

Inactive Publication Date: 2019-11-15
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] But the amplitude of SNSPD photon response pulse is limited by the product of bias current and load impedance, which is one of the main sources of time-domain jitter caused by SNSPD noise

Method used

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  • High-speed superconductive nanowire single-photon detector integrating impedance matching structure
  • High-speed superconductive nanowire single-photon detector integrating impedance matching structure
  • High-speed superconductive nanowire single-photon detector integrating impedance matching structure

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Effect test

Embodiment 1

[0035] Light enters the closed-cycle refrigerator through a single-mode fiber, and is received by a single-photon detector through a fiber focuser. The anode of the single photon detector is connected to the high impedance end of the impedance matching structure, the cathode is connected to the 150 ohm resistor 4, and the other end of the ohm resistor 4 is grounded. The low impedance end of the impedance matching structure is connected with the current source 5 and the load 2 .

[0036] When a photon is incident on the single photon detector, the superconducting nanowire 3 changes from a superconducting state to a resistance state, forming a voltage pulse, and forming an output voltage through the transmission line. The impedance matching structure is high-pass, and acts as a transformer on the rising edge of the voltage pulse, that is, when the high-frequency signal passes through. Compared with the readout circuit of the traditional superconducting nanowire single photon det...

Embodiment 2

[0039] The impedance matching structure and the processing of the ohmic resistor 4:

[0040] A layer of titanium niobium nitride material with a thickness of about 9 nm is sputtered on the substrate by means of magnetron sputtering;

[0041] The nanowire pattern is transferred to the electron beam exposure glue by electron beam exposure method, and the electron beam exposure glue is used as a mask, and the nanowire pattern is etched by reactive ion beam etching method;

[0042] Through the method of photolithography-reactive ion beam etching-removing glue, use photoresist as a mask to dig out rectangular grooves on the niobium nitride film;

[0043] Deposit a strip-shaped titanium resistor at the trench by photolithography-electron beam evaporation-stripping method;

[0044] By means of photolithography-electron beam evaporation-stripping, a gold electrode aligned with the titanium resistor is deposited on the superconducting film, and the titanium resistor partially overlaps...

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Abstract

The invention discloses a high-speed superconductive nanowire single-photon detector integrating an impedance matching structure. The detector comprises a superconductive conical transmission line, wherein the superconductive conical transmission line serves as the impedance matching structure and is connected with a load and a superconductive nanowire; the impedance matching structure is a coplanar waveguide, and characteristic impedance of the impedance matching structure gradually changes from kilo-ohms to dozens of ohms; a high-impedance end of the superconductive conical transmission lineis connected with the superconductive nanowire, and a low-impedance end of the superconductive conical transmission line is connected with the load; and an ohmic resistor is connected between the superconductive nanowire and the ground. Through the detector, the rising edge slope of an output pulse is increased, and a short response recovery time is maintained.

Description

technical field [0001] The invention relates to the field of optoelectronic devices, in particular to a superconducting nanowire single photon detector with high speed and integrated impedance matching structure. Background technique [0002] Superconducting nanowire single photon detector (SNSPD) is a new type of single photon detector in the 21st century. It has many advantages such as fast response speed, high detection efficiency, low dark count rate, small time domain jitter, and wide spectral response range. It has been widely used in quantum key distribution, biomedical imaging, laser ranging and other fields. [0003] But the amplitude of SNSPD photon response pulse is limited by the product of bias current and load impedance, which is one of the main sources of time-domain jitter caused by SNSPD noise. Contents of the invention [0004] The present invention provides a superconducting nanowire single photon detector with high speed and integrated impedance matchi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J1/42G01J11/00
CPCG01J1/42G01J11/00G01J2001/4238G01J2001/442
Inventor 胡小龙兰潇健邹锴曾嵘胡南许亮孟赟范理
Owner TIANJIN UNIV
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