Terahertz ring-couple metamaterial device based on photoselective control of metal-two-dimensional organic-inorganic hybrid perovskite and its preparation method

A terahertz ring couple, perovskite technology, applied in metal material coating process, optical components, solid-state lasers, etc., can solve the problems of complex structure and preparation process, cumbersome control method, narrow application range, etc., and achieve a simple structure. , low cost and high structural reliability
CN110534910BActive Publication Date: 2021-07-27HARBIN UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HARBIN UNIV OF SCI & TECH
Publication Date
2021-07-27

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Abstract

A terahertz ring-couple device and its preparation method based on photoselective control of metal-two-dimensional organic-inorganic hybrid perovskite metamaterials, which relate to the field of microelectronics and terahertz metamaterial functional devices. It needs to solve the problems of cumbersome structure and preparation process, single function and narrow application range of existing terahertz ring dipole metamaterials. Device: including a substrate, two double-opened metal resonant ring structural units arranged periodically, and two-dimensional organic-inorganic hybrid perovskites covered with different components on the two double-opened metal resonant rings. Method: coating photoresist on high-resistance silicon, pre-baking, exposing, developing and fixing; depositing metal; depositing Parylene to form a mask structure; coating perovskite solution; annealing; depositing Parylene to form a mask structure; Apply perovskite solution; anneal. The application condition of the invention is simple, the working mode can be switched freely, the process is simple, and the cost is low. The invention is applied to the fields of microelectronics and terahertz supermaterial functional devices.
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Description

technical field

[0001] The invention relates to the field of microelectronics and terahertz metamaterial functional devices. Background technique

[0002] Terahertz wave refers to the electromagnetic spectrum with a frequency of 0.1-10THz. It is in the cross field of electronics and photonics, and it is the last electromagnetic wave band that has not been fully developed by human beings. Compared with electromagnetic waves in other frequency bands, terahertz waves have unique properties such as high transmission, broadband, and low energy, which make terahertz technology have great scientific value and vast potential in many high-tech fields such as large-capacity communication, biological imaging, and security inspection. application prospects. With the rapid development and initial commercialization of terahertz technology, the demand for flexible tunable terahertz functional devices is becoming more and more urgent, which also accelerates the research and exploration of ...

Claims

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