Method and product of coating nanocrystalline thin film based on plasma atomic layer deposition

Abstract

The invention belongs to the field of preparation of nanocrystalline films, and particularly discloses a method for coating a nanocrystalline film based on plasma atomic layer deposition and a product. The method comprises the following steps that (a) the nanocrystalline film is prepared, and the obtained nanocrystalline film is put in a reaction cavity of an atomic layer deposition device and heated; (b) gaseous silane is introduced into the reaction cavity to react with the nanocrystalline film, and carrier gas is continuously introduced in the reaction process to keep the gas pressure in the reaction cavity constant; (c) oxygen plasma is introduced into the reaction cavity, carrier gas is continuously introduced in the reaction process to keep the gas pressure in the reaction cavity constant, silicon oxide is generated, and the surface of the nanocrystalline film is coated with silicon oxide; and (d) the steps (b)-(c) are repeated until the thickness of silicon oxide reaches a preset thickness value. By means of the method, the problem that nanocrystalline is prone to being eroded by water and oxygen and accordingly the luminescence performance of the nanocrystalline is lost issolved. The method has the advantages of being convenient to control, high in adaptability, low in cost, suitable for mass production and the like.

Description

technical field [0001] The invention belongs to the field of preparation of nanocrystalline thin films, and more specifically relates to a method and product for coating nanocrystalline thin films based on plasma atomic layer deposition. Background technique [0002] Nanocrystals, also known as quantum dots, are nanoparticles composed of II-VI or III-V elements. Its particle size is generally between 1 and 10 nm. Since electrons and holes are quantum-confined, the continuous energy band structure becomes a discrete energy level structure with molecular characteristics, and can emit fluorescence after being excited. The emission spectrum of quantum dots can be controlled by changing the size of quantum dots, which has the effects of adjustable band gap, wide excitation spectrum and narrow emission spectrum, and has a wide range of applications in solar cells, light-emitting devices, optical biomarkers and other fields prospect. [0003] Although quantum dots have excellent ...

AI Technical Summary

Problems solved by technology

[0005] Aiming at the above defects or improvement needs of the prior art, the present invention provides a method and product based on plasma atomic layer deposition coating nanocrystalline film, by adopting plasma-enhanced atomic layer deposition method to deposit and oxidize the surface of nanocrystalline film Silicon cladding layer, in this way, can not only effectively solve the problem that nanocrystals are susceptible to water and oxygen erosion, causing them to lose their luminescent properties, but also has the advantages of easy manipulation, strong adaptability, low cost and suitable for mass production.

Images