Ultraviolet nanosecond laser direct-writing micro-fluidic chip preparation system and method

A microfluidic chip, laser direct writing technology, applied in laser welding equipment, chemical instruments and methods, manufacturing tools, etc., can solve problems such as lack of flexibility in processing methods, achieve simple and controllable operation and debugging, and low system environment requirements , The effect of low processing cost
CN110744206AActive Publication Date: 2020-02-04广州市凯佳光学科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
广州市凯佳光学科技有限公司
Publication Date
2020-02-04

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Abstract

The invention relates to an ultraviolet nanosecond laser direct-writing micro-fluidic chip preparation system and method. The micro-fluidic chip preparation system comprises an ultraviolet nanosecondlaser, an electrically controlled diaphragm, a laser beam expander, a light beam converter, a light beam rotator, a lens, a dichroscope, a laser cutting head, a three-dimensional moving platform and acontrol device. The light beam converter composed of a binary phase plate and an axicon is adopted, a smooth high-quality zero-order and large-Rayleigh-length Bessel laser can be effectively generated, a first-order aperture outside zero-order light in the center of a zero-order Bessel light beam is effectively erased, and therefore the processing quality of the Bessel light beam is effectively improved. Processing of a laser direct-writing micro-fluidic chip with a high vertical depth ratio can be achieved, the laser processing efficiency is improved, and the system is simple in structure, convenient to operate and capable of being used for high-efficiency and high-quality processing of micro-fluidic chips in various schemes.
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Description

technical field

[0001] The invention relates to the technical field of laser preparation, in particular to a preparation system and method for an ultraviolet nanosecond laser direct writing microfluidic chip. Background technique

[0002] As one of the main means of micro-nano manufacturing, laser micro-nano processing technology has the characteristics of non-contact, low pollution and high processing precision. Laser direct writing processing is to focus the laser beam and directly expose it on the surface of the material to form a microstructure. Compared with infrared and visible light band lasers, ultraviolet lasers have lower thermal effects. With the rapid development of the ultraviolet pulse laser industry in recent years, the increase in laser power and the reduction in product prices make them more suitable for the industrialization of laser micro-nano processing systems. Successful applications have widely covered many fields such as microelectronics, materials s...

Claims

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