Preparation method of visible-shortwave infrared light detection substrate based on oxide/gold nanorod/silicon

A gold nanorod, infrared light technology, applied in climate sustainability, final product manufacturing, sustainable manufacturing/processing, etc., can solve the problems of hindering silicon application, limited light absorption intensity, and high carrier recombination rate, reaching Good detection characteristics, wide spectral response range and strong anti-interference ability
CN110993731BActive Publication Date: 2021-06-04SHANGHAI NAT ENG RES CENT FORNANOTECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANGHAI NAT ENG RES CENT FORNANOTECH
Publication Date
2021-06-04

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Abstract

The invention relates to a preparation method of a visible-short-wave infrared light detection substrate based on an oxide layer / gold nanorod / silicon, and a silver-induced seedless method is used to synthesize small-sized gold nanorods with different aspect ratios; To the surface of the silicon wafer as a light absorbing layer, after annealing treatment to obtain a more tightly bonded gold nanorod / silicon wafer substrate; deposit different oxide films on the surface of the gold nanorod / silicon composite substrate to construct a heterojunction with good photoelectric response structure, and finally obtained a new visible-short-wave infrared light detection substrate of oxide / gold nanorod / silicon substrate. The composite substrate can exhibit extremely high detection sensitivity to visible-short-wave infrared light. Compared with the prior art, the detection substrate obtained by the present invention has the advantages of wide spectral response range, high response sensitivity, adjustable response band, strong anti-interference ability and the like.
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Description

technical field

[0001] The invention belongs to the field of semiconductor nanomaterials and photoelectric detection, and in particular relates to a preparation method of a visible-short-wave infrared light detection substrate based on oxide / gold nanorod / silicon. Background technique

[0002] In the 21st century, information technology and the Internet have increasingly profound influence on human society. With the support of high-tech technologies such as 5G, big data, and cloud computing, the future is about to enter the era of the Internet of Things and artificial intelligence. higher requirement. When "Moore's Law" is gradually failing, the problems of traditional semiconductor devices such as difficulty in miniaturization, performance bottlenecks, and substantial increase in power consumption are becoming more and more prominent. Therefore, the task of developing new semiconductor devices is imminent. Nanomaterials have become a research hotspot due to their many uniqu...

Claims

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