Hydrophobic surface coating and preparation method thereof
A surface coating and hydrophobic technology, applied in the direction of coating, etc., can solve the problems of performance limitations of coating materials, performance limitations of glass substrates, etc., and achieve the effect of saving thermal annealing treatment process, high compactness and good mechanical properties
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Examples
Embodiment 1
[0071] A kind of hydrophobic surface coating and preparation method applied to glass substrates in the present invention, through the following steps:
[0072]First clean the glass substrate with acetone or isopropanol, dry it with a dust-free cloth, and then dry it in a drying oven for 24 hours.
[0073] Place the dried glass substrate in a 1000L plasma vacuum reaction chamber, and continuously evacuate the reaction chamber to make the vacuum degree reach 80 mTorr.
[0074] The plasma ion source gas argon is introduced, the flow rate is 20sccm, and the radio frequency discharge is turned on to pretreat the glass substrate. The discharge power in the pretreatment stage is 50W, and the discharge time is 300s.
[0075] The reaction gas raw material perfluorobutyl alcohol is vaporized and introduced into the reaction chamber, and the hydrophobic surface coating is prepared by chemical vapor deposition on the surface of the substrate. During the coating preparation process, the m...
Embodiment 2
[0080] A kind of hydrophobic surface coating and preparation method applied to glass substrates in the present invention, through the following steps:
[0081] First clean the glass substrate with acetone or isopropanol, dry it with a dust-free cloth, and then dry it in a drying oven for 24 hours.
[0082] The dried glass substrate is placed in a 1000L plasma vacuum reaction chamber, and the reaction chamber is continuously evacuated to make the vacuum degree reach 100 mTorr.
[0083] The plasma ion source gas argon is introduced, the flow rate is 20sccm, and the radio frequency discharge is turned on to pretreat the glass substrate. The discharge power in the pretreatment stage is 200W, and the discharge lasts for 600s.
[0084] The reaction gas raw material perfluorohexyl alcohol is vaporized and introduced into the reaction chamber, and the nano coating is prepared by chemical vapor deposition on the surface of the glass substrate. During the coating preparation process, t...
Embodiment 3
[0089] A kind of hydrophobic surface coating and preparation method applied to glass substrates in the present invention, through the following steps:
[0090] First clean the glass substrate with acetone or isopropanol, dry it with a dust-free cloth, and then dry it in a drying oven for 24 hours.
[0091] The dried glass substrate is placed in a 1000L plasma vacuum reaction chamber, and the reaction chamber is continuously evacuated to make the vacuum degree reach 40 mTorr.
[0092] The plasma ion source gas helium is introduced, the flow rate is 40sccm, and the microwave discharge is turned on to pretreat the glass substrate. The discharge power in the pretreatment stage is 500W, and the discharge time is 600s.
[0093] The reaction gas raw material perfluorobutyl propanol is vaporized and introduced into the reaction chamber, and the nano-coating is prepared by chemical vapor deposition on the surface of the substrate. During the coating preparation process, the monomer va...
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Abstract
Description
Claims
Application Information
- IPC
- C03C17/32; C03C17/30
- CPC
- C03C17/32; C03C17/30; C03C2217/76; C03C2218/153
- Inventors
- 宗坚; 康必显