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Foldable stretchable electrode based on cracked flexible substrate and its fabrication method

A manufacturing method, flexible substrate technology, applied in cable/conductor manufacturing, conductive layer on insulating carrier, equipment for manufacturing conductive/semiconductive layer, etc., can solve poor stability, low conductivity, electrode stretching Small range and other problems, to achieve the effect of wide stretching range, good controllability and simple process

Active Publication Date: 2022-01-28
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Existing stretchable electrodes mostly use conductive materials compounded on flexible substrates, which usually require complex processes such as photolithography, and the stretchable range of the prepared electrodes is small, poor stability or poor conductivity. low rate
In addition, some stretchable electrodes sacrifice electrical conductivity for increased stretching range, or sacrifice stretchable range for improved adhesion of conductive materials to substrates.

Method used

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  • Foldable stretchable electrode based on cracked flexible substrate and its fabrication method
  • Foldable stretchable electrode based on cracked flexible substrate and its fabrication method
  • Foldable stretchable electrode based on cracked flexible substrate and its fabrication method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] A method for fabricating a foldable stretchable electrode based on a cracked flexible substrate may include the following steps:

[0041] Use polydimethylsiloxane film (PDMS) as the flexible substrate;

[0042] 1) The polydimethylsiloxane film is treated with oxygen plasma to form cracks consisting of a plurality of cracks with relatively consistent orientations on one or both sides of the polydimethylsiloxane film Structure; among them, the time of oxygen plasma treatment is 1-50min, the power is 10-500W, and the pressure is 1-500Pa;

[0043] 2) Then use (3-mercaptopropyl)trimethoxysilane (MPTMS) to carry out 5 steps on the polydimethylsiloxane film with a cracked structure at 20-200°C under a continuous vacuum state (below 0.01MPa). -300min surface modification treatment; the dosage of (3-mercaptopropyl)trimethoxysilane is 1-50μL / m 2 ;

[0044] 3) Finally, in a certain pre-stretched state, a gold film is made on the polydimethylsiloxane film as a conductive layer b...

Embodiment 2

[0047] Polyimide film (PI) is selected as the flexible substrate;

[0048] 1) The polyimide film is treated by ultraviolet treatment to form a crack structure composed of a plurality of cracks with relatively consistent orientations on one or both sides of the polyimide film; the wavelength used in the ultraviolet treatment 10-380nm, the intensity of UV treatment is 10mW / cm 2 ;

[0049] 2) adopt oxygen plasma treatment (time is 1-50min, power is 10-500W, pressure is 1-500Pa) to carry out surface hydrophilic treatment to the polyimide film that forms crack structure;

[0050]3) Produce poly 3,4-ethylenedioxythiophene: polyphenylene dioxythiophene on polyimide film by spin coating (spin coating at 500-6000r / s spin coating speed for 10-60s) in a certain pre-stretched state. Ethylene sulfonate (PEDOT:PSS) film is used as a conductive layer, and the conductive layer at least covers the crack structure, thereby forming a stretchable electrode in which the conductive film (or condu...

Embodiment 3

[0053] Use polyethylene terephthalate film (PET) as the flexible substrate;

[0054] 1) It is transferred to the flat cotton, and the polyethylene terephthalate film is processed by ultraviolet treatment, so that the single or both sides of the polyethylene terephthalate film A crack structure consisting of a plurality of cracks with relatively consistent orientations is formed on the surface; the wavelength of ultraviolet light used in ultraviolet treatment is 185-254nm, and the intensity of ultraviolet treatment is 10mW / cm 2 ;

[0055] 2) No further treatment is required on the surface of the polyethylene terephthalate film, and it is produced on the polyethylene terephthalate film by evaporation or electron beam evaporation in a certain pre-stretched state Silver is used as a conductive layer, and the conductive layer at least covers the crack structure, thereby forming a stretchable electrode in which the conductive film (or conductive layer) can be folded or stretched du...

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Abstract

The invention discloses a foldable stretchable electrode based on a cracked flexible substrate and a manufacturing method thereof. The manufacturing method includes: processing the flexible substrate to form a crack structure on the surface of the flexible substrate, the crack structure including a plurality of cracks with the same orientation; at least the crack structure on the flexible substrate A conductive layer is formed on it. The manufacturing method of the present invention utilizes the characteristic that various flexible substrates produce cracks with relatively uniform orientations under different treatment methods, and after the surface is repaired, conductive materials are compounded, and then a stretchable electrode with foldable characteristics is prepared, and the electrode also has It has the advantages of wide stretching range, high electrical conductivity, and excellent stability.

Description

technical field [0001] The invention relates to a stretchable electrode, in particular to a foldable stretchable electrode based on a cracked flexible substrate and a manufacturing method thereof, belonging to the technical field of micro-nano electronic devices. Background technique [0002] Stretchable electronics is an increasingly important field for integrating electronic components with biology due to the growing demand for wearable devices and bio-implantable devices in human society. For example, detecting electrophysiological signals, establishing a human-machine connection, or providing convenient treatment, etc. Stretchable electrodes are the necessary basis for connecting all electronic components to form stretchable electronic products, so the preparation of stretchable electrodes with wide stretching range, high conductivity and good stability has attracted extensive attention. [0003] Stretchable electrodes are mainly prepared in two ways. One of the method...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01B5/14H01B13/00
CPCH01B5/14H01B13/0026
Inventor 李立强谭子婷李红卫
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI