Preparation method of alkali metal layer of thin-film solar cell and coating equipment
A technology of solar cells and alkali metals, which is applied in the coating process of metal materials, coatings, circuits, etc., can solve problems such as irregularity, rough surface of the light-absorbing layer, and reduce the power of thin-film solar cells, so as to improve conversion efficiency and improve The effect of power
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Embodiment 1
[0042] Such as figure 1 As shown, Example 1 of the application provides a thin-film solar cell, which includes a substrate 3, a back electrode layer 4, a buffer layer 10, a window layer 11 and a top electrode layer 9 arranged in sequence, wherein, at the back electrode An absorption layer 7 and an alkali metal layer 8 are also arranged between the layer 4 and the buffer layer 10, the absorption layer 7 is disposed on the surface of the back electrode layer 4 away from the substrate 3, and the alkali metal layer 8 is disposed on the absorption layer 7 away from the substrate 3 on the surface.
[0043] In Embodiment 1, the substrate 3 is soda lime glass or other glass substrates.
[0044] The back electrode layer 4 is one or a combination of at least two of a molybdenum electrode layer, a titanium electrode layer, a chromium electrode layer, and a transparent conductive layer with a dense structure.
[0045]The absorption layer 7 is a copper indium gallium selenide film layer,...
Embodiment 2
[0067] Such as image 3 As shown, a thin film solar cell provided in Example 2 includes the substrate 3 described in Example 1, the back electrode layer 4, the absorption layer 7, the alkali metal layer 8, the buffer layer 10, the window layer 11 and the top electrode layer 9, it also includes an alkali metal preset layer 6 disposed between the back electrode layer 4 and the absorption layer 7.
[0068] Preferably, the alkali metal pre-set layer 6 includes an alkali metal compound, and the alkali metal compound includes at least one of alkali metal elements Li, Na, K, Rb, and Cs, and halogen elements. The alkali metal element of the alkali metal provisioning layer 6 is preferably Na. When the alkali metal in the alkali metal layer 8 diffuses into the absorber layer 7, the Na in the alkali metal preset layer 6 deposited on the absorber layer 7 will be pushed back to the inside of the film layer to the back electrode layer 4 / absorber layer 7 interface, At the same time, the al...
Embodiment 3
[0072] Such as Figure 4 with Figure 5 As shown, the alkali metal source 221 mentioned in the preparation method of the thin-film solar cell absorbing layer in Example 3 of the present application has even rows, and the even-numbered row of base metal sources 221 is arranged in the coating chamber 22, and along the In the width direction 222 , even rows of alkali metal sources 221 are symmetrically arranged on both sides of the coating chamber 22 . Each row of alkali metal sources 221 is arranged on the outer wall of the coating chamber 22 in a straight line, and each row of alkali metal sources 221 can also be arranged on the outer wall of the coating chamber 22 in a broken line or a curve.
[0073] Such as Image 6 As shown, the angle γ between the centerline 223 of the alkali metal source 221 and the reference line 224 is 16-50°, and the reference line 224 is a straight line perpendicular to the bottom of the coating chamber 22 .
[0074] Preferably, the angle γ between...
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Abstract
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