Micro-pressure sensor chip and preparation method thereof
A micro-pressure sensor and chip technology, applied in piezoelectric/electrostrictive/magnetostrictive devices, instruments, microstructure technology, etc., can solve problems such as complex process, small temperature drift, large input impedance, etc., to improve sensitivity Effects of output, improvement of dynamic performance, and improvement of natural frequency
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[0045] In order to make the purpose and technical solution of the present invention clearer and easier to understand. The present invention will be further described in detail below in conjunction with the drawings and embodiments. The specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0046] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner" and "outer" are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and Simplified descriptions, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular ori...
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