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A kind of large diameter diamond side window micro x-ray tube and packaging method

An X-ray tube and diamond technology, which is applied in the field of large-diameter diamond side window micro-X-ray tubes and packaging, can solve the problems of difficult application of large-diameter X-ray tubes, difficulty in realizing X-ray collimation, and ineffective shielding, etc., to achieve Improve the excitation efficiency, not easy to leak, reduce the background effect

Active Publication Date: 2020-09-22
CHENGDU UNIVERSITY OF TECHNOLOGY +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Beryllium can guarantee a certain degree of transparency to X-rays, and cannot effectively shield the characteristic X-rays of metal materials in the tube; Beryllium and its compounds are highly toxic and lethal in a small amount; and their mechanical strength is not high, so it is difficult to apply to the production of large-diameter X-ray tubes
The aluminum alloy window has good ductility and mechanical strength, but when the primary rays emitted by the anode target pass through the aluminum alloy window, it will excite the characteristic X-rays of the window material, which will affect the subsequent quantitative analysis of the same elements in the sample to be tested. Interference; the glass window light tube has the simplest structure, and its inherent defects are: it cannot effectively shield the characteristic X-rays of metal materials such as anode targets and bases in the ray tube, and it is difficult to achieve collimation of X-rays

Method used

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  • A kind of large diameter diamond side window micro x-ray tube and packaging method
  • A kind of large diameter diamond side window micro x-ray tube and packaging method
  • A kind of large diameter diamond side window micro x-ray tube and packaging method

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] Embodiment 1: see figure 1 and figure 2 , a large-diameter diamond side-window micro-X-ray tube, including a vacuum envelope, a cathode, an anode and an X-ray transmission component;

[0034] The vacuum envelope includes a horizontally arranged cylindrical tube body 1 and an exit tube 2 located on its side wall. The central axis of the exit tube 2 is perpendicular to the central axis of the tube body 1. production;

[0035] The X-ray transmission assembly includes a base connected to the exit tube 2, and a window 3 is arranged on the base;

[0036] The base adopts a nickel-copper alloy base 4, the material of the window 3 is diamond, and the window 3 is welded to the nickel-copper alloy base 4 by solder, and the solder is diamond micropowder, oxygen-free copper-based alloy particles and Monel 67 alloy The mixture of particles burns to a high temperature molten state.

[0037] In this embodiment, the ratio of the diameter of the window 3 to the diameter of the pipe ...

Embodiment 2

[0044] Example 2: see Figure 1 to Figure 2 , the present embodiment provides a specific large-diameter diamond side-window micro X-ray tube structure. Such as figure 1 As shown, it includes tube body 1, exit tube 2, window 3, nickel-copper alloy base 4, cold finger 5, positioner 6, anode target base 7, anode target 8, sealing ring 9, pin 10, electron gun 11 , Protective cover 12. The cathode and anode in the tube body 1 and their connections are as follows:

[0045] Anode: the anode target 8 is connected to the anode target base 7, the anode target base 7 is connected to the cold finger 5, and the anode target 8, the anode target base 7, and the cold finger 5 are fixed on one end of the tube body 1 by the locator 6;

[0046] Cathode: pin 10 is connected with electron gun 11 containing collimator, and fixed at the other end of tube body 1;

[0047] Cold finger 5: The anode target 8 is welded on the positioner 6, and is led out by the cold finger 5 to realize heat export. ...

Embodiment 3

[0050] Embodiment 3: on the basis of embodiment 1 and embodiment 2, we further describe solder, wherein, solder is the mixture of diamond micropowder, oxygen-free copper-based alloy particle and Monel 67 alloy particle, and described diamond micropowder diameter is φ≤0.5μm, the oxygen-free copper-based alloy particles are Sn 53 Cu 47 , the Monel 67 alloy particles are Ni 67 Cu 28 Fe 2.5 mn 1.5 , and the remaining 1% is impurities.

[0051] The mass ratio of the three components in the solder is: diamond: 20-27; oxygen-free copper-based alloy particles: 56-65; Monel 67 alloy particles: 15-17.

[0052] We specifically adopt the following mass ratios:

[0053] Table 1: Mass ratio of each component of solder

[0054]

[0055] After many experiments, it can be seen that the above mass ratios can realize the tight welding of the diamond window 3 and the base, ensuring 133.322×10 -6 -133.322×10 -7 Pa vacuum.

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Abstract

The invention discloses a large-diameter diamond side-window micro X-ray tube and a packaging method, wherein the base of the large-diameter diamond side-window micro X-ray tube adopts a nickel-copper alloy base, the window material is diamond, and the window is passed through solder It is welded with the nickel-copper alloy base, and the solder is a mixture of diamond micropowder, oxygen-free copper-based alloy particles and Monel 67 alloy particles, which is burned to a high-temperature molten state. In the packaging method, the solder is mainly burned to a high-temperature molten state, and the window and the nickel-copper alloy base are welded and sealed under the condition of 600-700°C. The invention can greatly improve the peak-to-total ratio of the primary spectrum, and the diamond window has high mechanical strength, the X-ray exit window is larger, and the excitation efficiency of the primary X-ray can be improved. The invention effectively expands the application field of the diamond functional material, and at the same time greatly improves the performance of the existing side-window type X-ray tube.

Description

technical field [0001] The invention relates to an X-ray tube and a packaging method thereof, in particular to a large-diameter diamond side-window micro X-ray tube and a packaging method thereof. Background technique [0002] At present, the X-ray detection equipment used in China is basically monopolized by foreign products, and the market for its most important component, the side-window micro X-ray tube, is occupied by foreign companies such as Shimadzu, Oxford, PhoeniX, and KeveX. In recent years, although domestic manufacturers of X-ray tubes have also begun to rise, compared with foreign companies, their market share and cost performance are quite different. [0003] The side-window micro X-ray tube is mainly used for on-site energy dispersive x-fluorescence analysis of elements. It has the characteristics of light weight, simple structure, convenient operation, long measurement range, and the theoretically measurable range: Na~U, etc. The window of the side window m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J35/16H01J9/26
CPCH01J9/26H01J35/16
Inventor 赵剑锟葛良全张庆贤李天斌谷懿罗耀耀孙坤
Owner CHENGDU UNIVERSITY OF TECHNOLOGY