Composite flexible pressure sensor based on bionic microstructure and preparation method of composite flexible pressure sensor

Abstract

The invention provides a composite flexible pressure sensor based on a bionic microstructure and a preparation method of the composite flexible pressure sensor. The pressure sensor is divided into a capacitor layer, a common substrate layer and a piezoresistive layer from top to bottom. The capacitor layer comprises a protective film layer, a first electrode layer, a dielectric layer and a secondelectrode layer from top to bottom; the piezoresistive layer comprises a transverse electrode layer, a longitudinal electrode layer, a dielectric layer, a staggered electrode layer and a substrate film from top to bottom; the dielectric layer adopts a double-layer double-stage dome bionic microstructure and is made of a polymer with adjustable elasticity modulus, which is the same as that of the common substrate layer. The dielectric layer adopts a single-layer two-stage dome bionic microstructure, and is made of a nanoscale conductive composite material prepared by filling a flexible polymerwith multi-walled carbon nanotubes (MWCNT) and carbon black (CB); and the bottom staggered electrode layer adopts a multi-stage S-shaped interconnected wire structure. The composite flexible pressuresensor has the characteristics of relatively large detection range, high sensitivity, good stability and strong anti-interference performance.

Description

technical field [0001] The invention belongs to the field of flexible electronics and sensors, and in particular relates to a composite flexible pressure sensor based on a bionic microstructure and a preparation method thereof. Background technique [0002] With the continuous development of flexible electronic devices, in order to meet the needs of the intelligent era, a variety of flexible pressure sensors have been developed worldwide to detect pressures of different magnitudes. The flexible pressure sensor has a simple structure, ultra-thin and very small mass, and also has variable characteristics and good stability. Flexible pressure sensors have been widely used in fields such as technology. [0003] At present, flexible pressure sensors have been concerned by researchers in terms of sensitivity, pressure detection range, anti-interference, repeatability, stretchability, and transparency. Literature research shows that there are still two main shortcomings in the ex...

AI Technical Summary

Problems solved by technology

Literature research shows that there are still two main shortcomings in the existing flexible tactile sensors: first, the detection range of flexible pressure sensors that focus on micro-pressure detection is generally small, and the sensitivity is low under high pressure (the pressure within the detection range is relatively large); This limits the development of flexible pressure sensors in more application fields; second, flexible pressure sensors generally cannot collect multi-source signals at the same time, mainly through the planar integration of multiple sensors (sensor array) to achieve multi-signal detection, combined with signal processing system analysis and identification The position where the pressure is applied significantly increases the workload of signal processing and reduces the integration of flexible pressure sensors. At the same time, the cost is further increased due to the manufacture of multiple sensors, which urgently needs to be solved

Images