Preparation method of Mo-V-C-N composite coating

A composite coating, mo-v-c-n technology, applied in the coating, metal material coating process, ion implantation plating, etc., can solve the problems of difficult to meet the needs of lubrication, long service life, difficult to obtain, etc., to avoid cracking And peeling, good wear resistance, uniform and dense structure

Active Publication Date: 2020-08-14
西安稀有金属材料研究院有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, with the rapid oxidation and consumption of metals, the coating will fail rapidly, and it is difficult to obtain a long service life
It can be seen that coating materials with a single component and structure are difficult to meet the needs of the space environment for the lubrication of parts, while multi-component multi-phase composite coatings are expected to show more excellent anti-friction and wear-resistant effects

Method used

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  • Preparation method of Mo-V-C-N composite coating
  • Preparation method of Mo-V-C-N composite coating
  • Preparation method of Mo-V-C-N composite coating

Examples

Experimental program
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Effect test

Embodiment 1

[0037] This embodiment includes the following steps:

[0038] Step 1. Use 80 in sequence # 、280 # 、400 # 、600 # , 800 # 、1000 # , 1500 # , 2000 # The surface of the TC4 titanium alloy substrate was ground and polished with metallographic sandpaper, and then the ground and polished substrate was placed in analytically pure acetone and analytically pure ethanol for ultrasonic cleaning, and then ultrasonically cleaned in deionized water. Air blower drying to obtain a clean TC4 titanium alloy substrate;

[0039] Step 2. Fix the Mo target and the V arc target with a mass purity of 99.99% on the position of the magnetron sputtering source of the magnetron sputtering equipment, and put the clean TC4 titanium alloy substrate obtained in step 1 into the magnetron sputtering In the vacuum chamber of the injection equipment and fixed on the rotatable sample holder, then close the door of the vacuum chamber, turn on the mechanical pump and the molecular pump in turn to evacuate th...

Embodiment 2

[0050] This embodiment includes the following steps:

[0051] Step 1. Use 80 in sequence # 、280 # 、400 # 、600 # , 800 # 、1000 # , 1500 # , 2000 # The surface of the stainless steel substrate is ground and polished with metallographic sandpaper, and then the ground and polished substrate is placed in analytically pure acetone and analytically pure ethanol for ultrasonic cleaning, and then ultrasonically cleaned in deionized water, and blown by a hot air blower. Dry to get a clean stainless steel substrate;

[0052] Step 2: Fix the Mo target and the V-arc target with a mass purity of 99.99% on the position of the magnetron sputtering source of the magnetron sputtering equipment, and load the clean stainless steel substrate obtained in step 1 into the magnetron sputtering equipment and fixed on the rotatable sample holder, then close the door of the vacuum chamber, turn on the mechanical pump and the molecular pump in turn to evacuate the vacuum chamber to a vacuum degree...

Embodiment 3

[0063] This embodiment includes the following steps:

[0064] Step 1. Use 80 in sequence # 、280 # 、400 # 、600 # , 800 # 、1000 # , 1500 # , 2000 # The surface of the superalloy substrate is ground and polished with metallographic sandpaper, and then the ground and polished substrate is placed in analytically pure acetone and analytically pure ethanol for ultrasonic cleaning, and then ultrasonically cleaned in deionized water. Blow dry to obtain a clean superalloy substrate;

[0065] Step 2. Fix the Mo target and the V arc target with a mass purity of 99.99% on the position of the magnetron sputtering source of the magnetron sputtering equipment, and put the clean superalloy substrate obtained in step 1 into the magnetron sputtering The vacuum chamber of the equipment is fixed on the rotatable sample holder, then the door of the vacuum chamber is closed, and the mechanical pump and the molecular pump are turned on in turn to evacuate the vacuum chamber to a vacuum degree...

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Abstract

The invention discloses a preparation method of an Mo-V-C-N composite coating. The method comprises the steps that firstly, a substrate is treated; secondly, an Mo target, a V arc target and the substrate are placed, and a vacuum chamber is vacuumized and heated; thirdly, the substrate is etched; fourthly, an Mo priming layer is formed through deposition; fifthly, an Mo-V buffer layer is formed through deposition; sixthly, an Mo-V-N transition layer is formed through deposition; seventhly, an Mo-V-C-N body layer is formed through deposition; eighthly, vacuum annealing treatment is performed; and ninthly, the substrate provided with the Mo-V-C-N composite coating on the surface is obtained through cooling. According to the preparation method, through layered arrangement of the Mo-V-C-N composite coating, good component transition is formed, good combination with the substrate is ensured, and cracking and stripping of the Mo-V-C-N composite coating are avoided; and the prepared Mo-V-C-Ncomposite coating is uniform and dense in structure, high in hardness, good in toughness, low in friction coefficient and good in wear resistance, has a lubricating effect under both high temperatureand low temperature and is suitable for serving as a space self-lubricating layer.

Description

technical field [0001] The invention belongs to the technical field of surface coating preparation, and in particular relates to a preparation method of a Mo-V-C-N composite coating. Background technique [0002] Wear is one of the main reasons for the failure of mechanical parts. Liquid lubricating grease can effectively alleviate the friction and wear behavior between some common mechanism components. But in recent years, with the rapid development of my country's deep space exploration and space nuclear energy technology, the extremely harsh working conditions have exceeded the use limit of lubricating grease. In view of this, the research focus of space tribology has shifted from lubrication and lubrication system to material surface engineering. The preparation of a layer of self-lubricating coating material on the surface of friction pair parts through material surface modification technology can not only effectively solve the wear problem, but also can Significantly ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/02C23C14/06C23C14/16C23C14/58C23C14/54
CPCC23C14/352C23C14/0036C23C14/0057C23C14/025C23C14/028C23C14/022C23C14/0664C23C14/165C23C14/0641C23C14/5806C23C14/54
Inventor 邱龙时赵婧潘晓龙田丰张思雨张于胜
Owner 西安稀有金属材料研究院有限公司
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