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Metal powder sample preparation method for glow discharge mass spectrometry

A glow discharge mass spectrometry and metal powder technology, which is applied in the preparation of test samples, material analysis by electromagnetic means, and material analysis, etc. It can solve the problem that materials with narrow range and high hardness are difficult to apply and are not suitable for powder Problems such as sample preparation and testing, to achieve the effect of not easy to fall off, reduce difficulty, and good mosaic effect

Pending Publication Date: 2020-08-18
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method is to directly compress the sample into a sheet, which is applicable to a narrow range of samples, and it is difficult to apply to materials with high hardness, and it is not suitable for sample preparation and testing of powder samples.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0049] This embodiment provides a metal powder sample preparation method for glow discharge mass spectrometry analysis, and the sample preparation method includes the following steps:

[0050] (1) The conductive substrate and the mold are cleaned with a mixed solution of nitric acid, hydrofluoric acid and water, and the volume ratio of nitric acid, hydrofluoric acid and water in the mixed solution is 1:1:12; The titanium powder is evenly distributed on the conductive substrate; wherein, the purity of the metal titanium powder is 99.99%, the particle size is 250 mesh, the conductive substrate is indium flakes, and the mass ratio of the metal titanium powder to the indium flakes is 1:10;

[0051] (2) Put the titanium metal powder and the conductive base indium sheet into a polytetrafluoroethylene mold, the shape of the mold is matched with the conductive base, and then heat and pressurize, the heating temperature is 140 ° C, and the pressing pressure is 6MPa, the metal titanium ...

Embodiment 2

[0054] This embodiment provides a metal powder sample preparation method for glow discharge mass spectrometry analysis, and the sample preparation method includes the following steps:

[0055] (1) The conductive substrate and the mold are cleaned with a mixed solution of nitric acid, hydrofluoric acid and water, and the volume ratio of nitric acid, hydrofluoric acid and water in the mixed solution is 1:1.5:20; after cleaning, the metal The titanium powder is evenly distributed on the conductive substrate; wherein, the purity of the metal titanium powder is 99.95%, the particle size is 50 meshes, the conductive substrate is an indium block, and the mass ratio of the metal titanium powder to the indium block is 1:15;

[0056] (2) Put the metal titanium powder and the conductive matrix indium block into a polytetrafluoroethylene mold, the shape of the mold is matched with the conductive matrix, and then heat and pressurize, the heating temperature is 130 ° C, and the pressing pres...

Embodiment 3

[0059] This embodiment provides a metal powder sample preparation method for glow discharge mass spectrometry analysis, and the sample preparation method includes the following steps:

[0060] (1) The conductive substrate and the mold are cleaned with a mixed solution of nitric acid, hydrofluoric acid and water, and the volume ratio of nitric acid, hydrofluoric acid and water in the mixed solution is 1:1.2:8; after cleaning, the metal The titanium powder is evenly distributed on the conductive substrate; wherein, the purity of the metal titanium powder is 99.9%, the particle size is 500 meshes, the conductive substrate is indium flakes, and the mass ratio of the metal titanium powder to the indium flakes is 1:5;

[0061] (2) Put the titanium metal powder and the conductive matrix indium sheet into a PTFE mold, the shape of the mold is matched with the conductive matrix, and then heat and pressurize, the heating temperature is 150 ° C, and the pressing pressure is 8MPa, the met...

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Abstract

The invention provides a metal powder sample preparation method for glow discharge mass spectrometry, which comprises the following steps: putting metal powder to be detected on a conductive substrate, putting the metal powder to be detected and the conductive substrate into a mold together, performing heating and pressurizing, and embedding the metal powder into the conductive substrate to finishsample preparation. According to the method, the metal powder is embedded into the conductive substrate through heating and pressurizing, the metal powder is embedded stably and is not prone to falling off, a high-quality sample for GDMS detection can be prepared, and the success rate can reach 98% or above; by means of acid pickling before sample preparation and use of the mold, impurities on the surfaces of the conductive substrate and the mold can be effectively removed, pollution possibly caused by the sample is reduced, and the accuracy of detection data is improved.

Description

technical field [0001] The invention belongs to the technical field of sample analysis and detection, and relates to a metal powder sample preparation method for glow discharge mass spectrometry analysis. Background technique [0002] With the rapid development of integrated circuits, flat-panel display, and solar energy industries, the demand for functional thin-film materials is increasing. Magnetron sputtering technology is one of the key technologies for preparing thin-film materials, of which metal targets are the key to the magnetron sputtering process. Consumables have broad application prospects in the above industries. [0003] The purity of the metal target is one of the key factors affecting the performance of the film material prepared by it. The higher the purity, the less impurity elements in the film, the better the corrosion resistance, electrical properties and optical properties of the film. However, in practical applications, targets for different purpose...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N1/36G01N1/28G01N1/34G01N1/44G01N27/68
CPCG01N1/36G01N1/34G01N1/286G01N1/44G01N27/68
Inventor 姚力军潘杰边逸军王学泽温毅博
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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