A kind of graphene electrode resonator and manufacturing method thereof

Abstract

The present invention proposes a method for manufacturing a graphene electrode resonator, comprising: 1) in a tube furnace, the resonator is placed in a quartz tube, and an inert gas is charged to remove the air in the quartz tube; 2) heating Keep at 1000-1200° C. for 30-60 minutes; 3) At the end of the reaction, cool the system to room temperature under inert gas. The present invention also proposes a graphene electrode resonator, comprising: a resonator quartz shell layer and a resonator graphene electrode layer, and the resonator graphene electrode layer is attached to the inner side of the resonator quartz shell layer. The graphene-coated resonator proposed by the invention has high electrical conductivity, good capacitance effect, large charge storage, high exchange efficiency, and can reduce the drive voltage of the resonator.

Description

technical field [0001] The invention relates to the technical field of coating treatment, and more specifically, to a graphene electrode resonator and a manufacturing method thereof. Background technique [0002] Hemispherical resonant gyroscope (HRG) is a Coriolis vibrating gyroscope. Compared with the traditional mechanical gyroscope, it has no high-speed rotor and movable support in structure, good stability, high precision, small size, low noise, High resolution, long life, high reliability, and anti-nuclear radiation and other functions, so it is widely used in aviation, aerospace, ships, weapons and other weapons and equipment. It is the inertial navigation guidance, carrier attitude stability control, An extremely important part of units such as inertial measurement. [0003] The core sensitive part of the hemispherical resonator gyroscope is the hemispherical thin-shell resonator. The resonator is made of fused silica glass material with low thermal expansion coeffi...

AI Technical Summary

Problems solved by technology

[0006] (1) The uniformity of the coating on the spherical surface is not well controlled;

[0007] (2) The mechanical properties of the quartz resonator body and the metal electrode are far apart, and the internal loss of the film layer is large, which affects the Q value;

[0008] (3) The expansion coefficients of quartz and metal do not match;

[0009] (4) The chemical properties of the metal film are unstable;

[0010] (5) Composite metal films are generally used, and some metals have low melting points, which are far from quartz, and are not suitable for high-temperature treatment

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