Unlock instant, AI-driven research and patent intelligence for your innovation.

Single-tower low-temperature rectification argon recycling system with cycle and single-tower low-temperature rectification argon recycling method

A low-temperature rectification and argon gas technology, which is applied in liquefaction, solidification, cold treatment and separation, etc., can solve the problems of many moving parts, high energy consumption, and large investment, and achieve the goals of reducing operating energy consumption, improving recovery rate, and enhancing efficiency Effect

Pending Publication Date: 2020-09-08
上海联风气体有限公司
View PDF7 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problems of many moving parts, high energy consumption and large investment in the existing argon gas recovery technology, the present invention provides a single-tower low-temperature rectification recovery system and method for argon gas with circulation

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Single-tower low-temperature rectification argon recycling system with cycle and single-tower low-temperature rectification argon recycling method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] Such as figure 1 As shown, this embodiment provides a single-column low-temperature rectification recovery argon system with circulation, including an argon compressor 1, a carbon monoxide remover 2, a first cooler 3, a deaerator 4, and a second cooler 5 , argon precooler 6, purification system 7, rectification cold box 8 and argon circulation compressor 18; rectification cold box 8 includes heat exchanger 9, argon tower reboiler 10, crude liquid argon throttle valve 11 , refined argon tower 12, pure liquid argon throttle valve 13, argon tower condensing evaporator 15 and auxiliary reboiler 16;

[0032] The pipeline connection sequence is:

[0033] Argon compressor 1, carbon monoxide remover 2, first cooler 3, deaerator 4, second cooler 5, argon precooler 7, and purification system 7 are connected in sequence;

[0034] The gas outlet pipeline of the purification system 7 is connected to the argon column reboiler 10 through the heat exchanger 9, and the condensation si...

Embodiment 2

[0041] Using the system provided in Example 1, this example provides a method for recovering argon:

[0042] 1890Nm to be recycled 3 / h waste argon pressure is very low, mixed with about 5% of air, first the above waste argon is pressurized to 1.45MPa (A) through argon compressor 1, enters carbon monoxide remover 2 through pipeline GAr-101, and removes carbon monoxide The catalyst is filled in the vessel 2, and carbon monoxide is catalyzed into carbon dioxide through catalytic reaction, and the CO outlet content is less than 1ppm; the waste argon gas that removes CO comes out and enters the first cooler 3 through the pipeline GAr-102 to cool to 35-40°C. After the pipeline GAr-103 is mixed with the added hydrogen, it enters the deaerator 4, and in the deaerator 4, oxygen and hydrogen react to generate water and release heat (depending on the amount of oxygen, the temperature rise will be different, in O2 When the content is not higher than 0.4%, the temperature will be 2 、H 2 ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a single-tower low-temperature rectification argon recycling system with cycle and a single-tower low-temperature rectification argon recycling method. The system comprises anargon compressor, a carbon monoxide remover, a first cooler, an oxygen remover, a second cooler, an argon precooler, a purification system, a rectification cold box and an argon cyclic compressor. Therectification cold box comprises a heat exchanger, an argon tower reboiler, a rough liquid argon throttle valve, a fine argon tower, a pure liquid argon throttle valve, an argon tower condensation evaporator and an auxiliary reboiler. Convenience that the recycling site can provide liquid argon is utilized, the cooling capacity is provided through liquid argon, independent arrangement of an expander is not needed, rough argon is purified, the low-temperature rectification method is utilized for removing nitrogen and hydrogen, the efficiency of a rectification tower is enhanced through cyclicargon, the argon recycling rate is improved, the low-temperature rectification process and operation are simplified, and running energy consumption is reduced.

Description

technical field [0001] The invention relates to the technical field of argon recovery, in particular to a system and method for recovering argon by single-tower low-temperature rectification with circulation. Background technique [0002] The Czochralski method is the main method for producing monocrystalline silicon, and 70% to 80% of the world's monocrystalline silicon is produced by the Czochralski method. The most commonly used process for producing single crystal silicon by the Czochralski method is a decompression crystal pulling process that is similar to a vacuum process and a flowing atmosphere process; High-purity argon is introduced into the furnace, and the vacuum pump continuously pumps argon from the furnace to keep the vacuum in the furnace stable at about 20 torr. This process has both the characteristics of vacuum technology and the characteristics of flow atmosphere technology. Vacuum pumps for decompression crystal pulling process generally use slide valv...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): F25J3/02F25J5/00
CPCF25J3/0285F25J5/007F25J3/08F25J2200/02F25J2200/40F25J2200/50F25J2200/72F25J2205/04F25J2205/40F25J2205/66F25J2205/82F25J2210/58F25J2215/58F25J2245/02F25J2250/20F25J2270/02F25J2270/58F25J2270/904
Inventor 郝文炳
Owner 上海联风气体有限公司