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Hydrophobic material protected by microstructure as well as preparation method and application thereof

A hydrophobic material, microstructure technology, applied in microstructure technology, microstructure device, manufacturing microstructure device, etc., can solve the problem of easy damage, short service life, poor light transmittance, wear resistance, etc. question

Pending Publication Date: 2020-10-20
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In view of the lack of mechanical stability of the existing hydrophobic coating, it is easy to be damaged in the actual use environment, the service life is short, and the overall performance of the light transmittance and wear resistance is not good. Hydrophobic material protected by microstructure and its preparation method and application to solve one or more problems of the prior art

Method used

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  • Hydrophobic material protected by microstructure as well as preparation method and application thereof
  • Hydrophobic material protected by microstructure as well as preparation method and application thereof
  • Hydrophobic material protected by microstructure as well as preparation method and application thereof

Examples

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Effect test

preparation example Construction

[0056] Preparation method of microstructure

[0057] The method of preparing the microstructure on the substrate is not limited, and can be selected according to the nature of the substrate itself. For example, the microstructure can be directly prepared by microfabrication techniques such as photolithography, micromilling, or the mold can be made first, and then the microstructure can be indirectly prepared by the method of transferring the pattern to the substrate by cold / hot pressing technology.

[0058] Method of filling hydrophobic filler

[0059] According to the specific morphology of the microstructure, the hydrophobic filler can be filled in the gaps between the microstructure units by vapor deposition, spin coating / spraying, evaporation, or magnetron sputtering. The hydrophobic filler can fill all the voids between the microstructure units, or can only fill a part of it. For example, the hydrophobic filler forms a thin layer to cover the surface of the microstructure unit ...

Embodiment 1

[0064] The hydrophobic material prepared in this embodiment includes an array composed of discontinuous quadrangular pyramid microstructure units prepared on a silicon substrate (such as figure 2 (Shown), there is a polymer hydrophobic filler between the microstructure units. The sidewall angle of the quadrangular pyramid is 125°, the side length of the quadrangular pyramid is 60μm, the height is 40μm, and the interval between adjacent quadrangular pyramids is 3.5μm; the microstructure is prepared by photolithography and wet etching on the silicon substrate, and the Hydrophobic fillers are deposited in the microstructure frame for protection by vapor deposition, such as image 3 Shown.

[0065] The preparation of the silicon substrate quadrangular pyramid microstructure-photolithography and wet etching, the process steps are: firstly treat the silicon wafer with plasma for 30 minutes, and then bake the wafer at 260°C for 30 minutes. After the treated silicon wafer was uniformly ...

Embodiment 2

[0069] The hydrophobic material prepared in this embodiment includes a silicon substrate as the substrate to be filled. On the silicon wafer substrate, a quadrangular pyramid microstructure is prepared by photolithography and wet etching methods (the method is the same as in Example 1), and the hydrophobic filler is filled by spin coating. Inside the microstructure.

[0070] Filling of hydrophobic material-spin coating method, the specific steps are: the microstructured silicon wafer is subjected to acetone, alcohol, and deionized water ultrasonic treatment for 5 minutes. Then it was placed on a spin coater, and fluorinated oil WP140 was spin-coated at a speed of 3000 rpm for 20 seconds. Finally, put the filled silicon wafers in an oven at 60°C for drying.

[0071] The surface of the microstructured hydrophobic material prepared in this example was subjected to 20 scratch experiments with a blade. The results show that the surface of the hydrophobic material prepared in this exam...

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Abstract

The invention provides a hydrophobic material protected by a microstructure, which comprises a substrate, at least one surface of the substrate is provided with a microstructure composed of a plurality of microstructure units, and hydrophobic fillers are arranged in gaps among the plurality of microstructure units and / or in the plurality of microstructure units. The invention further provides a preparation method and an application of the hydrophobic material protected by the microstructure. According to the invention, the hydrophobic material which is easy to damage and fall off and has poormechanical properties is protected; the hydrophobic material is prevented from bearing severe acting force such as external impact and frictional wear in the using process, the durability of the hydrophobic surface in practical application is greatly improved, and the hydrophobic material can be used for self-cleaning, antifouling, anti-corrosion, mildew-proof and anti-icing surfaces for a long time and has very high universality and practicability.

Description

Technical field [0001] The invention relates to the field of hydrophobic materials, in particular to a hydrophobic material protected by a microstructure, as well as a preparation method and application thereof. Background technique [0002] Surface water-repellent technology is a basic research technology with extensive knowledge and high practical value. At present, hydrophobic material coatings have been widely used in many aspects of modern life and industry. By designing material coatings with different structures, chemical and physical properties, new additional functions can be provided on the surface of solid materials. In particular, the rapidly increasing demand for hydrophobic material coatings in modern industry has made functionalized hydrophobic material coatings widely concerned. [0003] The hydrophobic layer is usually a type of low surface energy coating material coated on the surface of various substrates, mainly including organic materials such as organosilane ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/00B81B7/04B81C1/00
CPCB81B7/0009B81B7/04B81C1/00206B81C1/00214
Inventor 邓旭于凡斐王德辉
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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