Nanoneedle array and its preparation method and application
A nano-needle and array technology, applied in the field of nano-needle array and its preparation, can solve the problems of difficult adjustment of nano-pillar size parameters, limited size of nano-needle array, difficulty in mass production, etc., and achieves large aspect ratio, stable related parameters, Efficient effect
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[0040] On the one hand, the embodiment of the present invention provides a method for preparing a nanoneedle array. The process flow of the preparation method of the nanoneedle array is as follows: figure 1 and figure 2 As shown, it includes the following steps:
[0041] S01: forming a substrate film layer 11 to be etched on the surface of the substrate 01;
[0042] S02: forming a mask layer 12 for etching nanoneedle array patterns on the surface of the substrate film layer 11 to be etched away from the substrate;
[0043] S03. Etching treatment on the surface of the substrate film layer 11 to be etched containing the mask layer 12: from the direction of the mask layer 12 to the substrate 01, to the substrate film layer 11 formed with the mask layer 12 Etching the surface of the substrate film layer 11 to perform a first etching treatment to form a nano-column array;
[0044] S04. Carrying out the etching treatment of the tip structure 14 on the top of the nanocolumn: per...
Embodiment 1
[0082] This embodiment provides a diamond nanoneedle array and a preparation method thereof. The process flow of the diamond nanoneedle array preparation method is as follows: figure 1 and 2 , which includes the following steps:
[0083] S11. Depositing a diamond film layer 11 on the substrate surface by microwave plasma chemical vapor deposition:
[0084] a. Substrate 01 pretreatment: The monocrystalline silicon substrate was ultrasonically cleaned in acetone and alcohol for 10 min, and then washed with H 2 o 2 : NH 3 OH: H 2 O (10:10:50) solution was heated to 80 °C for 10 min, and deionized water was ultrasonically cleaned for 10 min; then the cleaned silicon substrate was placed in a stable suspension of nano-diamond powder for 1 h, and the diamond The average particle size of the powder suspension is 5 nm, it exists in the most dispersed form, the Zeta potential is about +50 mV, and the diamond nucleation density exceeds 10 11 cm -2 ;
[0085] b. Deposit the dia...
Embodiment 2
[0097] This embodiment provides a diamond nanoneedle array and a preparation method thereof. The process flow of the diamond nanoneedle array preparation method is as follows: figure 1 and 2 , which includes the following steps:
[0098] S11. Depositing a diamond film layer 11 on the substrate surface by microwave plasma chemical vapor deposition:
[0099] a. Substrate 01 pretreatment: carry out with reference to step a in step S11 of embodiment 1;
[0100]b. Depositing a diamond film layer 11 on the substrate: carry out with reference to step b in step S11 of embodiment 1;
[0101] S12. Polishing the diamond film layer 11:
[0102] Carry out with reference to step S12 of embodiment 1;
[0103] S13. Forming the mask layer 12 by electron beam lithography:
[0104] In order to promote the adhesion between the E-beam resistor and the substrate, 10 nm of Ti was evaporated onto the diamond film substrate; then the high-resolution E-beam resist HSQ was spin-coated on the subst...
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