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Simple and convenient preparation method of double-focal-length microlens array structure

A technology of microlens array and array structure, applied in the field of micro-nano optics, can solve the problems of high technical threshold, inability to realize simple preparation of dual-focal length microlens array structure, complicated process, etc. Create efficient effects

Inactive Publication Date: 2020-11-20
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

However, the processing techniques used in the above-mentioned methods are complicated in process and high in technical threshold, and cannot realize the simple preparation of the double-focal-length microlens array structure.

Method used

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  • Simple and convenient preparation method of double-focal-length microlens array structure
  • Simple and convenient preparation method of double-focal-length microlens array structure
  • Simple and convenient preparation method of double-focal-length microlens array structure

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Embodiment 1

[0029] Such as figure 1 Shown is a technical principle diagram of a simple preparation method of a dual-focal-length microlens array structure disclosed by the present invention, which includes the following steps in turn:

[0030] Such as figure 1 As shown in 1-1, take a quartz substrate 1 with a flat surface, and use alcohol, acetone, and an ultrasonic cleaner to clean the surface of the substrate;

[0031] Such as figure 1 As shown in 1-2, adjust the parameters of the photoresist spin coating machine: the rotation speed is 8500 rpm, the rotation time is 30s, and a layer of AZ9260 (520cp) photoresist 2 is evenly coated on the surface of the substrate, and the low temperature of 90 ° C is applied. pre-baked;

[0032] Such as figure 1 As shown in 1-3, take a mask plate 3 for exposing the traditional hard lower layer structure, circular array light-shielding pattern period T=100 μm, diameter D=96 μm, use contact exposure technology to carry out ultraviolet exposure on photo...

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Abstract

The invention discloses a simple and convenient preparation method of a double-focal-length microlens array structure. The method comprises the following steps: firstly, preparing a lower-layer cylindrical photoresist array structure on a planar substrate by using a contact exposure and development technology; then, using an alignment mark overlay technology to assist the upper-layer structure tocarry out deterministic exposure, and realizing preparation of a coaxial double-layer cylindrical photoresist array structure after development; and finally, hot melting the cylindrical photoresist structure into a spherical crown-shaped structure by using a high-temperature hot reflux method, and meanwhile, using low-temperature gas to blow the surface of the substrate in parallel for cooling assistance, so that the situation that the double-layer cylindrical photoresist structure is hot-melted into a single spherical crown-shaped structure is avoided, accordingly, the double-layer sphericalcrown-shaped structure is prepared, and the double-focal-length micro-lens array structure can be obtained after cooling. The principle is simple and easy to implement, and simple and convenient preparation of the double-focal-length micro lens array structure is achieved; and moreover, by changing mask pattern design and process parameters, the double-focal-length microlens array structure with different microstructure sizes and focal lengths can be obtained.

Description

technical field [0001] The invention belongs to the technical field of micro-nano optics, and in particular relates to a simple and convenient preparation method of a double-focal-length micro-lens array structure. Background technique [0002] The microlens array structure has many characteristics different from traditional refractive lenses, including: the thickness is only on the order of microns, the incident wavefront can be divided into several regions, and the generated beams are arrayed. In recent years, it has been widely used in laser beam shaping technology, bionic compound eye system, fiber coupling system, light field camera, 3D stereoscopic display and other fields. [0003] The double-focal-length microlens array structure with two optical focal point distances is a deformation of the traditional microlens array structure, and its structural characteristics can be simply described as: small-diameter microlens arrays with the same period and large-diameter micr...

Claims

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Application Information

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IPC IPC(8): G02B3/00
CPCG02B3/0012
Inventor 刘鑫李敏杜俊峰雷柏平边疆
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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