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Inclined grating type polarization beam splitter applying slit waveguide structure and manufacturing method

A polarization beam splitter and tilted grating technology, applied in the direction of optical waveguide light guide, light guide, optics, etc., can solve the problems of restricting high-density chip integration, long directional coupler size, etc., and achieve small structure, low insertion loss, and high extinction than the effect

Pending Publication Date: 2020-12-08
苏州科沃微电子有限公司
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Problems solved by technology

It is well known that directional couplers composed of pure silicon waveguides are usually of long dimensions, which limits high-density on-chip integration

Method used

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  • Inclined grating type polarization beam splitter applying slit waveguide structure and manufacturing method
  • Inclined grating type polarization beam splitter applying slit waveguide structure and manufacturing method
  • Inclined grating type polarization beam splitter applying slit waveguide structure and manufacturing method

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Embodiment Construction

[0043] The present invention will be further described below in conjunction with accompanying drawing.

[0044] see Figure 1-4 , the tilted grating polarization beam splitter using the slit waveguide structure of the present invention, comprising: a silicon base substrate 1, a silicon dioxide buffer layer 2, a TE through section core layer 3, a TM coupling section core layer 4 and silicon dioxide Cladding 5.

[0045] A silicon dioxide buffer layer 2 is deposited on a silicon-based substrate 1 . The TE through section core layer 3 and the TM coupling section core layer 4 are located on the silicon dioxide buffer layer 2 and separated by a certain distance. The silicon dioxide cladding layer 5 is located on the silicon dioxide buffer layer 2 and covers the TE through-section core layer 3 and the TM coupling-section core layer 4 .

[0046] The TE through-section core layer 3 is based on the first silicon waveguide 6, and includes an input straight waveguide 31, a strip wavegu...

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Abstract

The invention discloses an inclined grating type polarization beam splitter applying a slit waveguide structure. The inclined grating type polarization beam splitter comprises a silicon-based substrate, a silicon dioxide buffer layer deposited on the silicon-based substrate, a TE straight-through section core layer positioned on the silicon dioxide buffer layer, a TM coupling section core layer positioned on the silicon dioxide buffer layer, and a silicon dioxide cladding arranged on the silicon dioxide buffer layer and coating the TE straight-through section core layer and the TM coupling section core layer. The whole structure is small and compact in size, high in coupling efficiency, high in extinction ratio, low in insertion loss and large in bandwidth. The invention further disclosesa manufacturing method of the inclined grating type polarization beam splitter.

Description

technical field [0001] The invention relates to the field of integrated silicon photonic chips, in particular to a polarization beam splitter. Background technique [0002] Polarizing beam splitter (PBS) is an important polarization processing device, which can separate and combine two modes, transverse electric (TE) and transverse magnetic (TM). Silicon-on-insulator (SOI) offers multiple benefits as a photonics platform, including compatibility with complementary metal-oxide-semiconductor (CMOS) fabrication and high index contrast, enabling dense integration. [0003] Polarizing beam splitters (PBS) with different structures have been realized, including directional coupler (DC), bent directional coupler (Bent DC), grating (Grating), multimode interferometer (MMI) and Mach-Zehnder interferometer ( MZI). PBS based on vertically coupled three-dimensional Mach-Zehnder interferometer has been reported, but it uses an additional metal heater and the fabrication process is comp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/12G02B6/126
CPCG02B6/12007G02B6/126G02B2006/12107G02B2006/1215
Inventor 冯吉军刘海鹏
Owner 苏州科沃微电子有限公司
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