Silicon-based broadband wide-angle scanning antenna unit

Abstract

The invention discloses a silicon-based broadband wide-angle scanning antenna unit which consists of a rectangular patch 1, a glass substrate 2, a slot coupling feed layer 3, a silicon-based substrateintegrated waveguide back cavity 4 and an impedance conversion layer 6 from top to bottom. A silicon-based metallized shielding through hole 5 penetrating through the upper surface and the lower surface of the silicon-based substrate integrated waveguide back cavity 4 is formed in the silicon-based substrate integrated waveguide back cavity 4; and the silicon-based metallized shielding through hole 5 connects the connecting slot coupling feed layer 3 with the impedance conversion layer 6, the impedance conversion layer 6 is a common-ground coplanar waveguide structure, and a middle strip-shaped extension part is a microstrip feed transmission line 7. The silicon-based broadband wide-angle scanning antenna unit disclosed by the invention is realized by adopting a standardized glass substrate, a silicon substrate and a standardized wiring, through hole and copper-tin bonding process so that the process complexity and the processing cost are reduced, and the whole structure has the advantages of a low profile, high reliability, a simple process, low cost and the like.

Description

technical field [0001] The invention belongs to the technical field of microwave antennas, in particular to a silicon-based wide bandwidth angle scanning antenna unit. Background technique [0002] With the depletion of wireless communication frequency band resources below 6GHz, the millimeter wave frequency band has become an inevitable trend in the development of wireless communication. Millimeter wave spectrum resources include frequency bands from 30 GHz to 300 GHz, which can be divided into "atmospheric window" and "non-atmospheric window" according to atmospheric attenuation, corresponding to the minimum and maximum frequency ranges of attenuation respectively. In addition to the "atmospheric window" frequency band, which is more suitable for long-distance wireless transmission, the "non-atmospheric window" frequency band has also received extensive attention and research because of its advantages in confidentiality and frequency reuse. Spectrum resources near 60GHz (...

AI Technical Summary

Problems solved by technology

The working wavelength corresponding to the 60GHz frequency band and the corresponding circuit size are small, and the requirements for processing accuracy are relatively high, especially in the application of the phased array system, the circuit size of the radiation unit and the like needs to meet the half-wavelength limit. The cost poses a great challenge

However, the traditional silicon-based process has a high dielectric constant and large loss, and the radiation efficiency of the all-silicon-based integrated antenna unit will not meet the general application requirements.

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