Production method of electronic grade sulfuric acid

A production method and electronic-grade technology are applied in the production of sulfuric acid and the production of electronic-grade sulfuric acid, which can solve the problems of difficult gas removal, low safety, and high operating temperature, so as to ensure evaporation efficiency and output, and improve utilization rate. , good degassing effect

Active Publication Date: 2021-03-30
联仕新材料(苏州)股份有限公司
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Problems solved by technology

[0005] In the preparation process of the above-mentioned prior art, steam is used for distillation and purification in the distillation purification stage, and the absorption stage is normal temperature absorption, and the operating temperature is relatively high, so the safety is low; at the same time, the degassing stage in the prior art also uses normal temperature Degassing method, the gas contained in the liquid is difficult to remove effectively

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  • Production method of electronic grade sulfuric acid
  • Production method of electronic grade sulfuric acid

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Embodiment Construction

[0037] In order to be able to understand the technical means of the present invention more clearly and implement it according to the contents of the description, the specific implementation of the present invention will be further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but not to limit the scope of the present invention.

[0038] The front-end preparation process of this specific embodiment is consistent with the prior art, as follows:

[0039] Sulfur-containing substances such as pyrite and sulfur are boiled and roasted in a fluidized fluidized furnace, and the furnace gas produced mainly contains sulfur dioxide, oxygen, nitrogen, water vapor, compounds such as arsenic and selenium, and mineral dust; the above-mentioned furnace gas is sequentially passed through After dry dust removal, wet purification and drying treatment, a furnace gas mainly containing sulfur...

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Abstract

The invention discloses a production method of electronic-grade sulfuric acid, which belongs to the technical field of electronic chemical production. The production method includes normal temperature absorption conversion, negative pressure low-temperature evaporation, low temperature absorption and temperature-increasing degassing steps, wherein the normal temperature absorption conversion is to absorb the sulfur trioxide in the furnace gas through concentrated sulfuric acid to obtain fuming sulfuric acid, and then use the fuming sulfuric acid Oxidative transformation of hydrogen peroxide aqueous solution; wherein the negative pressure low-temperature evaporation is to use an evaporation purification device to evaporate sulfur trioxide gas without boiling the liquid under the condition of low-temperature hot water below 50 ° C as the heating medium; Low-temperature absorption is absorption with ultra-pure water or ultra-pure sulfuric acid at low temperature; temperature-increasing degassing is the process of removing gas in a liquid at a temperature slightly higher than normal temperature. The production method can ensure the safety of operation while obtaining high-quality electronic-grade sulfuric acid and ensuring the output and efficiency.

Description

technical field [0001] The invention relates to a production method of sulfuric acid, in particular to a production method of electronic-grade sulfuric acid, and belongs to the technical field of electronic chemical production. Background technique [0002] Electronic grade sulfuric acid, also known as ultra-pure sulfuric acid, is an ultra-clean and high-purity reagent, and is the most widely used wet electronic chemical in industry. It is mainly used for cleaning, photolithography, corrosion, etc. of silicon wafers, as well as corrosion and cleaning of printed circuit boards, etc. , can effectively remove particulate impurities, inorganic residues and carbon deposits on wafers and printed circuit boards. [0003] The preparation process of electronic grade sulfuric acid mainly includes rectification method and gas absorption method. The rectification method is a distillation method that uses reflux to obtain high-purity separation of the liquid mixture. Specifically, the i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B17/765C01B17/90C01B17/80B01D1/06B01D1/02B01D1/30B01D1/00B01D3/10B01D53/14B01D53/18
CPCC01B17/765C01B17/90C01B17/806B01D1/06B01D1/02B01D1/30B01D1/0041B01D3/10B01D53/1481B01D53/18B01D2252/10
Inventor 林益兴王琴
Owner 联仕新材料(苏州)股份有限公司
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