Manufacturing method of ingot casting monocrystalline or polycrystalline amorphous silicon heterojunction solar cell

Abstract

The invention relates to a manufacturing method of an amorphous silicon heterojunction solar cell taking ingot single crystal or polycrystal as a substrate. The manufacturing method comprises the following steps: 1) performing single-side polishing texturing on an ingot single crystal (or polycrystal) silicon wafer; 2) forming a first passivation layer on the texturing surface; 3) forming an intrinsic polycrystalline silicon layer on the first passivation layer; 4) performing phosphorus diffusion treatment on two sides of the silicon wafer; 5) removing the diffusion layer; 6) forming a secondpassivation layer on the surface from which the diffusion layer is removed; 7) depositing transparent conductive film layers on two sides of the silicon wafer; and 8) forming metal electrodes on the front and back surfaces of the silicon wafer. According to the invention, the thin oxide layer is superposed with the polycrystalline phosphorus-doped layer to replace the traditional amorphous siliconintrinsic layer and phosphorus-doped layer, and the polycrystalline silicon film is used to replace the amorphous silicon film, so the light absorption coefficient of the material is reduced, the conductivity of the back electric field is improved, and the short-circuit current and the filling factor of the cell are improved.

Description

technical field [0001] The invention belongs to the field of solar cells, and in particular relates to a method for manufacturing an amorphous silicon heterojunction solar cell with an ingot single crystal or polycrystal as a substrate. Background technique [0002] In recent years, as an inexhaustible clean energy source, solar energy has become more and more popular in various countries. The research and development and production of solar cells are mainly carried out around the direction of cost reduction and efficiency increase. Improving the conversion efficiency of solar cells is the foundation of the development of solar energy business. Reducing the production cost of solar cells is the foundation of expanding the solar energy business and the prerequisite for mass production. condition. [0003] Silicon wafers are the carrier used in the production of silicon-based solar cells, and are generally divided into monocrystalline silicon wafers, quasi-monocrystalline sil...

AI Technical Summary

Problems solved by technology

It can solve the problems of low open-circuit voltage of solar cells, low conversion efficiency, and uncompetitive products in the prior art.

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