A method for making ingot monocrystalline or polycrystalline amorphous silicon heterojunction solar cells

Abstract

The invention relates to a method for manufacturing an amorphous silicon heterojunction solar cell with an ingot monocrystalline or polycrystalline as the substrate, which comprises the following steps: 1) making the ingot monocrystalline (or polycrystalline) silicon wafer Single-side polishing and texturing; 2) forming a first passivation layer on the texturing surface; 3) forming an intrinsic polysilicon layer on the first passivation layer; 4) performing phosphorus diffusion treatment on both sides of the silicon wafer; 5) removing the diffusion layer 6) A second passivation layer is formed on the side after removing the diffusion layer; 7) A transparent conductive film is deposited on both sides of the silicon wafer; 8) Metal electrodes are formed on the front and back sides of the silicon wafer. In the invention, the traditional amorphous silicon intrinsic layer and the phosphorus-doped layer are replaced by a thin oxide layer superimposed with a polycrystalline phosphorous-doped layer, and the amorphous silicon film is replaced by a polycrystalline silicon film, so as to reduce the light absorption coefficient of the material and improve the conductivity of the back electric field at the same time. It is beneficial to improve the short-circuit current and fill factor of the battery.

Description

technical field [0001] The invention belongs to the field of solar cells, and in particular relates to a method for manufacturing an amorphous silicon heterojunction solar cell sheet using an ingot single crystal or polycrystal as a substrate. Background technique [0002] In recent years, solar energy, as an inexhaustible clean energy, is more and more favored by all countries. The research and development and production of solar cells mainly focus on the direction of cost reduction and efficiency improvement. Improving the conversion efficiency of solar cells is the foundation of the development of the solar energy business. Reducing the production cost of solar cells is the basis for the expansion of the solar energy business and the prerequisite for large-scale production. condition. [0003] Silicon wafer is the carrier used in the production of silicon-based solar cells, and is generally divided into monocrystalline silicon wafers, monocrystalline silicon wafers and p...

AI Technical Summary

Problems solved by technology

It can solve the problems of low open-circuit voltage of solar cells, low conversion efficiency, and uncompetitive products in the prior art.

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