A method to reduce the production cost of multi-arc chromium target

Abstract

The invention provides a method for reducing the production cost of a multi-arc chromium target, comprising the following steps: step 1, preparing a No. 20 steel ladle; step 2, preparing a 304 stainless steel chip briquette with a density 10% higher than the tap density of chromium powder, Press the pure and dry 304 stainless steel shavings into a density of 4.62g / cm through a hydraulic press 3 Step 3, put the bottom layer of the ladle cover in step 1 into the 304 stainless steel chip briquette made in step 2; step 4, vacuum degassing; step 5, hot isostatic pressing: seal the step 4 The welded ladle cover is sent to the hot isostatic pressing machine for hot isostatic pressing; step six, machining the finished product. Using cheap and easy-to-obtain 304 stainless steel chips to replace expensive high-purity metal chromium can save about 25% of raw material input costs.

Description

technical field [0001] The invention belongs to the field of powder metallurgy, and in particular relates to a method capable of significantly reducing the processing cost of a multi-arc chromium target. Background technique [0002] Multi-arc ion plating technology is a kind of ion plating technology using cathodic arc evaporation source. In the 19th century, the American inventor Thomas Edison proposed the idea of ​​using vacuum arc for coating and applied for a US patent. After the 1980s, my country introduced a large number of equipment and technologies, and multi-arc ion plating has achieved rapid development. [0003] The basic components of multi-arc ion plating include vacuum coating chamber, cathode arc source, substrate, negative bias power supply, and vacuum system. Among them, the cathode arc source is the core of multi-arc ion plating, and the metal plasma generated by it automatically maintains the arc discharge between the cathode and the coating chamber. Th...

AI Technical Summary

Problems solved by technology

[0013] Therefore, in view of the current process and industry's demand for continuous reduction in the cost of multi-arc chromium targets, it is mainly aimed at the high cost of the material at the connecting thread and there is no need to use chromium as the base material, the subsequent wire cutting costs are high, and the two processes of inlaying and brazing copper blocks Complicated and there are practical problems such as the risk of falling off caused by thermal expansion and contraction during the coating process. This invention provides a complete set of solutions to optimize the material utilization rate and processing method to the optimum level, which not only reduces the cost but also improves the reliability of product use. sex