Double-sided multi-station winding type vacuum coating machine

Abstract

The invention discloses a double-sided multi-station winding type vacuum coating machine, which is used for preparing multiple film layers on a flexible base film in the field of new energy power batteries, and mainly comprises an unwinding chamber, vacuum evaporation coating chambers, a magnetron sputtering coating chamber, a winding chamber and a winding system. The magnetron sputtering coating chamber is vertically arranged and is positioned in the middle of the vacuum coating machine. The 2-10 vacuum evaporation coating chambers are arranged on the two sides of the magnetron sputtering coating chamber in two rows in a stacked mode, and evaporation devices are arranged in the vacuum evaporation coating chambers. The winding system mainly comprises an unwinding roller positioned in an unwinding chamber, a winding roller positioned in a winding chamber, and a main roller, a front pre-cooling roller and a rear pre-cooling roller which are arranged in each vacuum evaporation coating chamber. The main roller located above the evaporation device bears a base film needing to be subjected to evaporation coating, circulating cooling liquid is introduced into the main roller, and subzero treatment is conducted on the base film at the temperature ranging from-150 DEG C to-220 DEG C.

Description

technical field [0001] The invention belongs to the advanced manufacturing technology field of new energy power batteries, and in particular relates to a double-sided multi-station winding vacuum coating machine and a coating method applied to the manufacture of new energy power batteries. Background technique [0002] With the development of optical thin film technology and semiconductor technology, the application of vacuum coating technology in production is becoming more and more extensive and important, and vacuum evaporation coating is the earliest, most common and most widely used vacuum coating process. There are many types and types of vacuum evaporation coating machines. Among them, the intermittent vacuum evaporation coating machine has the longest history. However, due to its shortcomings such as inability to perform continuous coating, small coating area, and low production efficiency, it is difficult to meet the requirements of large-area flexible film coating. ...

AI Technical Summary

Problems solved by technology

When evaporative coating is performed on such ultra-thin flexible base films, the base film is easy to deform and wrinkle in the high coating heating environment temperature, and even cause the film base film to break due to excessive deformation, seriously affecting production efficiency and product quality

[0005] On the other hand, the coil coating generally requires a film penetration process before the start of the vacuum coating. In the existing coil coating equipment, most of the vacuum chambers need to be opened, and in the atmospheric environment, manually or by some mechanism in the coil system. Film penetration, this method will expose the base film and the inside of the vacuum coating machine to the atmosphere for a long time, especially when there are many winding coating modules and the film penetration path is complicated, it will have a negative impact on the quality of equipment and flexible coating products. more serious impact

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