Preparation method of aluminum oxide ceramic guide rail

Abstract

The invention relates to a preparation method of an aluminum oxide ceramic guide rail and belongs to the technical field of ceramic guide rail preparation. The preparation method comprises the following steps of: (1) mixing aluminum oxide and a sintering aid, mixing the mixture, water, a dispersing agent and a binder, and carrying out ball milling to obtain required slurry; (2) spray-drying the slurry to obtain granulation powder for later use; (3) performing a cold isostatic pressing process on the granulation powder to obtain a biscuit; (4) performing inner hole cutting on the biscuit by using fretsaw equipment to obtain a square hole ceramic guide rail biscuit; (5) sintering the green body to obtain a blank, milling the blank, and carrying out sintering to obtain a crude product; and (6) carrying out accurate grinding and polishing on the crude product to obtain the aluminum oxide ceramic guide rail. The preparation method is scientific and reasonable in design, and the prepared ceramic guide rail has the advantages of low volume density, high hardness, large elastic modulus, low thermal expansion coefficient, high hardness and high wear resistance.

Description

technical field [0001] The invention relates to a preparation method of an alumina ceramic guide rail, belonging to the technical field of ceramic guide rail preparation. Background technique [0002] At present, ceramic guide rails are the key moving structural components of ultra-precision machining and ultra-precision measuring equipment (such as ultra-precision mobile workbenches for lithography machines for semiconductor chip processing, ultra-precision machine tools for high-precision optical devices, ultra-precision three-coordinate measuring instruments, etc.). , The development of large-scale, high-precision high-tech ceramic guide rails is one of the key core technologies for manufacturing ultra-precision equipment. Most of the manufacturing of precision workbenches and precision guides in my country are based on metal materials. Metal materials are often affected by temperature during use, which cannot meet the requirements of precision control of structural parts...

AI Technical Summary

Problems solved by technology

The manufacture of precision worktables and precision guide rails in my country is mostly based on metal materials. Metal materials are often affected by temperature during use and cannot meet the requirements for precision control of structural parts. The components move relatively at high speed for a long time, and there are problems of wear and corrosion.

At present, metal materials can no longer meet the needs of ultra-precision machining and ultra-precision measuring equipment for the use of guide rail components

[0003] Large-size, high-precision high-tech ceramic guide rails, especially double-hole or porous ceramic guide rails with a length ≥ 1.5 meters, most of the cross-sections are required to be square, and the body size Larger, thicker, unreasonable molding process will directly lead to serious problems such as body cracking and deformation of the green body due to uneven pressure during the molding process. Most porous ceramic guide rails use green body bonding or ceramic bonding. can be obtained, but this will lead to the decline of the overall performance of the ceramic guide rail, low processing accuracy, and cracking of the bonded body during the reciprocating motion of the guide rail, etc.

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