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Normal-temperature vacuum getter and preparation method thereof

A technology of vacuum suction and normal temperature, which is applied in separation methods, chemical instruments and methods, and separation of dispersed particles. It can solve the problems of high chemical activity, poor adsorption effect, flammability and explosion of metal cerium, and achieve excellent absorption effect. , safe to use, easy to obtain raw materials

Active Publication Date: 2021-07-20
三河市华臻新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Activated Zr and Ti-based alloy getter powders are flammable and explosive, and have certain safety hazards
[0011] Patent CN106732326A discloses a getter material and its preparation method and getter. The getter material is half-reduced cerium oxide and copper oxide to obtain a mixture of metal element and metal oxide, and then mixed with an adsorption promoter The obtained getter material has a high chemical activity of metal cerium as a simple substance, is flammable in air, and has certain potential safety hazards
In addition, the getter has a significant effect on the most dominant residual gas H in the VIP 2 The adsorption effect of O is poor
[0012] At present, for the adsorption of residual gas in the VIP board, there is no room temperature vacuum getter on the market that has no safety hazards, is environmentally friendly, harmless to the human body, has high suction performance, and is reasonably priced.

Method used

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  • Normal-temperature vacuum getter and preparation method thereof
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  • Normal-temperature vacuum getter and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] Example 1 uses ultrafine silicon dioxide as the internal powder.

[0037] Weigh 2g of silicon dioxide powder with a particle size of 2-5 microns and put it into a cylindrical copper alloy shell; wherein, the size of the copper alloy shell is 10mm in diameter and 75mm in height.

[0038] Squeeze and close the opening of the copper alloy tube shell, and then put it into an argon atmosphere furnace for heating at a heating rate of 30°C / min, and raise the temperature to 370°C for heat preservation and activation. The heat preservation time is 2 hours. Then heat up and seal the opening of the copper alloy shell in the atmosphere furnace, the sealing temperature is 1020° C., and the holding time is 1 hour. After cooling down to room temperature with the furnace, the room temperature vacuum getter of Example 1 was prepared, and the designation code was HZ-1.

Embodiment 2

[0040] Example 2 uses ultrafine zeolite powder as the internal powder.

[0041] 2g of zeolite powder with a particle size of 3-6 microns is weighed and put into a cylindrical ferroalloy shell; wherein, the size of the ferroalloy shell is 10mm in diameter and 70mm in height.

[0042] Squeeze and close the opening of the ferroalloy tube shell, then put it into a nitrogen atmosphere furnace for heating at a rate of 30°C / min, and heat up to 400°C for heat preservation and activation. The heat preservation time is 4 hours. Then heat up and seal the opening of the ferroalloy shell in the atmosphere furnace, the sealing temperature is 1450° C., and the holding time is 0.5 hour. After cooling down to room temperature with the furnace, the room temperature vacuum getter of Example 2 was prepared, and the designation code was HZ-2.

Embodiment 3

[0044] Example 3 uses ultrafine montmorillonite powder as the internal powder.

[0045] Weigh 2g of montmorillonite powder with a particle size of 5-10 microns and put it into a cylindrical high borosilicate glass shell; wherein, the size of the high borosilicate glass shell is 7mm in diameter and 60mm in height. The opening of the high borosilicate glass tube shell is subjected to hot extrusion closing treatment, and then placed in a nitrogen atmosphere furnace for heating at a heating rate of 30°C / min, and the temperature is raised to 390°C for heat preservation and activation. The heat preservation time is 3 hours. Then heat and seal the opening of the high borosilicate glass tube shell in the atmosphere furnace, the sealing temperature is 830° C., and the holding time is 0.5 hour. After cooling down to room temperature with the furnace, the room temperature vacuum getter of Example 3 was prepared, and the designation code was HZ-3.

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Abstract

The invention discloses a normal-temperature vacuum getter and a preparation method thereof, and relates to the technical field of getters, the normal-temperature vacuum getter comprises an outer airtight tube shell and internal powder; wherein the outer-layer airtight tube shell is one of a glass tube shell and a metal tube shell; the internal powder is one or more of silicon dioxide powder, aluminum oxide powder, zeolite powder, graphite powder and montmorillonite powder. The normal-temperature vacuum getter can effectively avoid performance degradation of the getter in the VIP production operation process, does not need to be activated, has a good absorption effect on nitrogen, oxygen, water vapor, hydrogen, carbon dioxide and the like, and is safe and environmentally friendly.

Description

technical field [0001] The invention relates to the technical field of getters, in particular to a normal-temperature vacuum getter and a preparation method thereof. Background technique [0002] During the long-term service of vacuum components, getters are needed to maintain the vacuum degree. At present, traditional getters such as Zr-based, Ti-based and other alloy getters need to activate the getter material at high temperature (400°C-950°C) to realize the work of the getter. However, in many application scenarios, the high-temperature activation of alloy getters will cause irreversible thermal damage to vacuum components such as vacuum insulation panels, so the development of high-efficiency getters without activation at room temperature has greater application significance. [0003] Vacuum insulation panel (Vacuum Insulation Panel, referred to as VIP) is composed of core insulating material (insulating material, which can be called core material), gas barrier film (b...

Claims

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Application Information

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IPC IPC(8): B01D53/02
CPCB01D53/02
Inventor 张红穆文文
Owner 三河市华臻新材料有限公司
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