Polishing solution for polishing surface of monocrystalline silicon wafer and preparation method of polishing solution
A technology for surface polishing and monocrystalline silicon wafers, which is applied in the direction of polishing compositions containing abrasives, etc., can solve the problems of limiting the application range of polishing liquid, small polishing rate, and low Mohs hardness, and achieves low cost and fast polishing rate , the effect of not easy to settle
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preparation example Construction
[0056] The above-mentioned coated composite abrasive is prepared by liquid phase synthesis, and the neutral pH is controlled during the synthesis process, so that the silicon-aluminum species are evenly distributed, and at the same time, the surface precipitation of the aluminum species is controlled by acid treatment and washing, and a controllable aluminum species is formed. The silicon-coated structure improves the application range of the obtained abrasive chemical mechanical polishing. Among them, the silica-alumina oxide is prepared by a neutral gel synthesis process, the silica-alumina species are evenly distributed, the abrasive is easily dispersed in the water phase, and the formed colloidal system is stable and difficult to settle. Moreover, the surface precipitation of aluminum species can be controlled by acid treatment and washing to form a controllable aluminum-coated silicon structure, and the obtained abrasive chemical mechanical polishing has a wide range of ap...
Embodiment 1
[0061] A preparation method of a polishing liquid, comprising the following preparation steps:
[0062] Add 0.1 part of dimethyl benzyl dodecyl ammonium bromide and 0.5 part of ethylenediaminetetraacetic acid into 60 parts of deionized water, the stirring temperature is 20°C-30°C, and the stirring speed is 80r / min-120r / min , Stir evenly, and then mix 20 parts of abrasives while stirring to fully disperse the abrasives, and finally add 0.01 parts of ethylenediaminetetraacetic acid to adjust the pH value of the solution so that the pH is in the range of 7-9, and the product is ready.
[0063] Wherein, the preparation of the abrasive comprises the steps of:
[0064] Under the condition that the temperature is 30° C., 45 moles of aluminum sulfate and 75 liters of 20 wt % water glass are uniformly mixed. Inject 50L of bottom water into the stirred reaction vessel, heat up to 30°C, and add the above-mentioned water glass containing aluminum salt and 30wt% sulfuric acid to keep the ...
Embodiment 2
[0066] A preparation method of a polishing liquid, comprising the following preparation steps:
[0067] Add 0.1 part of dimethyl benzyl dodecyl ammonium bromide and 0.5 part of ethylenediaminetetraacetic acid into 60 parts of deionized water, the stirring temperature is 20°C-30°C, and the stirring speed is 80r / min-120r / min , Stir evenly, and then mix 20 parts of abrasives while stirring to fully disperse the abrasives, and finally add 0.01 parts of ethylenediaminetetraacetic acid to adjust the pH value of the solution so that the pH is in the range of 7-9, and the product is ready.
[0068] Wherein, the preparation of the abrasive comprises the steps of:
[0069] Under the condition that the temperature is 60° C., 15 moles of aluminum nitrate and 75 liters of 20 wt % water glass are uniformly mixed. Inject 50L of bottom water into the stirred reaction vessel, heat up to 30°C, and add the above-mentioned water glass containing aluminum salt and 10wt% sulfuric acid to keep the ...
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