Micro-nano optical fiber-waveguide-superconducting nanowire single-photon detector and preparation method thereof

Abstract

The invention provides a micro-nano optical fiber-waveguide-superconducting nanowire single-photon detector and a preparation method thereof. A micro-nano optical fiber fixed in a V-shaped groove can realize high-precision optical coupling alignment with a waveguide, and the transition section, which becomes thin from thick, of the micro-nano optical fiber is suspended, so that light is prevented from leaking to a substrate, and the loss in the optical transmission process is further reduced; the waveguide type superconducting nanowire structure can completely absorb light on a chip; due to the design of the corner waveguide, an optical coupling area of the micro-nano optical fiber-waveguide can be completely separated from an optical detection area of the waveguide type superconducting nanowire structure, dark counting caused by background radiation propagating along the optical fiber can be effectively reduced, and the influence of the background dark counting on optical detection is reduced; according to the invention, a single-photon detector integrating high detection efficiency, high counting rate, low time jitter and low dark counting can be realized, and the detector is expected to play a role in the fields of light quantum information processing, quantum optics and the like.

Description

technical field [0001] The invention belongs to the technical field of photoelectric detection, and relates to a micro-nano optical fiber-waveguide-superconducting nanowire single-photon detector and a preparation method. Background technique [0002] Superconducting Single Photon Detector (SSPD) is a single-photon detection technology that has attracted much attention in recent years, and its system efficiency can reach more than 90%. It has the advantages of time jitter and high count rate, and its spectral response is wide, covering the visible light band to the infrared band. High-performance SSPD devices have been widely used in many fields such as quantum key distribution, optical quantum computing, and deep space exploration. However, various performance indicators of SSPD are mutually restricted, such as dark count, detection speed, detection efficiency, time jitter, etc., and the current technology is still unable to integrate various high-performance indicators on...

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Problems solved by technology

[0004] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a micro-nano fiber-waveguide-superconducting nanowire single-photon detector and its preparation method, which are used to solve the problem of difficult integration of single-photon detectors in the prior art. Simultaneous optimization of various high-performance indicators

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