Flexible pressure sensor based on graphene array and preparation method thereof

Abstract

The invention discloses a graphene array-based flexible pressure sensor and a preparation method thereof. Two flexible substrates are distributed in parallel, and an upper graphene array and a lower graphene array are fixedly arranged on one flexible substrate and located between the two flexible substrates; the graphene pressure sensing units are distributed in an array mode, and the graphene pressure sensing units in the upper-layer graphene array and the graphene pressure sensing units in the lower-layer graphene array are aligned and tightly attached. When pressure acts on the graphene array, the graphene conductive paths are increased, a resistance value is reduced, the demodulation circuit can measure and calculate the resistance value change of each graphene pressure sensing unit, and the pressure change condition is accurately obtained through a pressure-resistance value fitting curve. Due to heat resistance of the flexible substrate material made of the polydimethylsiloxane material, the situation that the substrate materials such as polyethylene glycol terephthalate (PET) are easy to bend and deform in the laser direct writing process is avoided; crossing between the row electrodes and the column electrodes is avoided, and the structure is more optimized.

Description

technical field [0001] The invention relates to a graphene array-based flexible pressure sensor and a preparation method of the graphene array-based flexible pressure sensor, belonging to the technical field of pressure sensors. Background technique [0002] A pressure sensor is a sensor that can convert external physical forces, such as pressure and shear force, into the deformation of its own material, thereby triggering a change in the output electrical signal. It is widely used in aviation, aerospace, automotive and biomedical fields. [0003] With the rise of wearable devices, the research on pressure sensors has attracted more and more attention from the public. Most of the traditional pressure sensors use silicon piezoresistive pressure sensors, but with the development of wearable devices based on pressure sensors, traditional rigid sensors show obvious disadvantages. Generally, wearable devices that people use daily need to be attached to clothing or human skin, or...

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Problems solved by technology

[0004] At present, a graphene pressure sensor array system (patent number: 201610863656.5) uses the PECVD method to grow graphene films. This method requires a large investment in equipment, and the cost is much higher than that of the laser direct writing PI film used in the present invention to generate graphene; This patent needs to peel off the graphene layer during the preparation process, which is very easy to damage its microstructure; this patent mainly uses a rigid circuit board as the substrate for the preparation of the sensor, which does not conform to the development trend of wearable devices. The present invention uses a flexible substrate. The application range is wider; the patent adopts a cylindrical force-sensitive contact and a groove structure, and the preparation process is cumbersome

Graphene-based array flexible pressure distribution sensor and its preparation method (patent number: 201210013024.1) adopts the method of etching graphene film to form graphene array, the preparation process is complicated and the cost is high. isolated by insulation

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