Device for reducing background leakage rate of large vacuum chamber at high temperature

Abstract

The invention belongs to the technical field of vacuum application, and particularly relates to a device for reducing the background leakage rate of a large vacuum chamber at high temperature. According to the device, a dry pump, a reaction furnace and a liquid nitrogen heat exchanger are installed in a box body, the dry pump is fixedly installed at the bottom in the box body, and the dry pump, the reaction furnace and the liquid nitrogen heat exchanger are connected in parallel through a pipeline; one end of an air inlet extends out of the box body, and the other end of the air inlet is connected with a pipeline of the liquid nitrogen heat exchanger; an air outlet is simultaneously connected with a pipeline of the liquid nitrogen heat exchanger and a pipeline of the reaction furnace; the dry pump is used for exhausting the whole pipeline of a hydrogen removal system to achieve low vacuum; the reaction furnace is used as a gas reaction container, and a getter material is arranged in the reaction furnace; the liquid nitrogen heat exchanger exchanges heat with high-temperature gas from shielding block hot helium leak detection equipment, so that the temperature of the high-temperature gas is reduced. According to the invention, the background leak rate of the large vacuum chamber at high temperature can be effectively reduced, and the detection sensitivity of the whole set of hot helium leak detection test system can be improved, so that stricter leak detection requirements can be met.

Description

technical field

[0001] The invention belongs to the technical field of vacuum application, and in particular relates to a device for reducing the background leakage rate of a large vacuum chamber under high temperature. Background technique

[0002] Because leakage will cause serious consequences, spacecraft, pressure-bearing parts in fusion reactor vacuum chambers, storage containers / transportation pipelines for toxic, harmful, explosive and radioactive substances, etc., have extremely strict requirements on leakage, so helium leak testing is widely used in petrochemical, It is widely used in nuclear power, aerospace, automobile, packaging and transportation, air conditioning, space stack, power battery and other fields. Among them, the high-temperature shut-off valve of the space station and related pipeline welds, nuclear power fuel cladding tubes, and fusion reactor vacuum chamber components all need high-temperature helium leak detection, while rockets and other spacecr...

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