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Hydrogen sensor core, preparation method thereof and hydrogen sensor

A sensor core and sensor technology, used in instruments, scientific instruments, electrochemical variables of materials, etc., can solve problems such as complex preparation processes, and achieve the effects of low detection limit, high sensitivity and short response time

Pending Publication Date: 2021-09-17
48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The first hydrogen concentration range of the hydrogen sensor is 1000-20000ppm, and the second hydrogen concentration range is 10-1000ppm, but a single sensor needs to prepare a double-layer sensitive chip for collecting hydrogen at the same time, and it is equipped with two different demodulation circuit structures. , the preparation process is complex

Method used

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  • Hydrogen sensor core, preparation method thereof and hydrogen sensor
  • Hydrogen sensor core, preparation method thereof and hydrogen sensor
  • Hydrogen sensor core, preparation method thereof and hydrogen sensor

Examples

Experimental program
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Embodiment 1

[0054] like figure 1 As shown, the hydrogen sensor core body of the present embodiment includes:

[0055] semiconductor substrate 1;

[0056] A source 2 and a drain 3 formed on the semiconductor substrate 1;

[0057] a trench region formed on the surface of the semiconductor substrate 1 between the source 2 and the drain 3;

[0058] The dielectric layer 4 formed on the groove area, the thickness (h2) of the dielectric layer 4 positioned on the side of the groove area is 5nm;

[0059] The hydrogen sensitive layer 5 formed on the dielectric layer 4 uses the hydrogen sensitive layer 5 as a gate, wherein the width (h3) of the gate is 20nm, and the negative junction depth (h1) of the gate is 10nm;

[0060] A metal electrode layer 6 formed on the hydrogen sensitive layer 5 .

[0061] like figure 2 As shown, in the present invention, after hydrogen is adsorbed on the surface of the palladium or palladium alloy hydrogen sensitive layer, under its catalytic action, the hydrogen m...

Embodiment 2

[0076] like figure 1 As shown, the hydrogen sensor core body of the present embodiment includes:

[0077] semiconductor substrate 1;

[0078] A source 2 and a drain 3 formed on the semiconductor substrate 1;

[0079] a trench region formed on the surface of the semiconductor substrate 1 between the source 2 and the drain 3;

[0080] The dielectric layer 4 formed on the groove area, the thickness of the dielectric layer 4 located on the side of the groove area is 7nm;

[0081] The hydrogen sensitive layer 5 formed on the dielectric layer 4 uses the hydrogen sensitive layer 5 as a gate, wherein the width of the gate is 20nm, and the negative junction depth of the gate is 11nm;

[0082] A metal electrode layer 6 formed on the hydrogen sensitive layer 5 .

[0083] In this embodiment, the semiconductor substrate 1 is a P-type single wafer, and the doping concentration of boron is 2.2×10 17 cm -3 .

[0084] In this embodiment, the doping concentration of phosphorus in the sou...

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Abstract

The invention discloses a hydrogen sensor core, a preparation method thereof and a hydrogen sensor. The hydrogen sensor core comprises a semiconductor substrate, a source electrode, a drain electrode, a trench region, a dielectric layer, a hydrogen sensitive layer and a metal electrode layer which are arranged on the semiconductor substrate. The preparation method comprises the step of preparing the source electrode, the drain electrode, the trench region, the dielectric layer, the hydrogen sensitive layer and the metal electrode layer on the semiconductor substrate. The hydrogen sensor core has the advantages of being low in detection lower limit, high in sensitivity, short in response time and the like, the hydrogen sensor prepared from the hydrogen sensor core can detect the lower limit of hydrogen concentration which is very low and reaches 50 ppm, leakage of weak hydrogen can be found as soon as possible, and the effect of giving an alarm in advance is achieved; the response time is less than 60s, and the change of hydrogen concentration in the environment can be monitored in real time; the sensitivity reaches 10<5>A / A or above, and the hydrogen sensor can adapt to hydrogen detection under different pressure conditions, so that the hydrogen sensor has very high application value in the field of low-concentration hydrogen leakage detection.

Description

technical field [0001] The invention relates to a hydrogen sensor core body, a preparation method thereof and a hydrogen sensor. Background technique [0002] Transformer failure is the main cause of power plants, substation outages and local power grid accidents. Reducing transformer failure means improving the economic benefits of the power grid and ensuring national economic security and social stability. Therefore, transformer online monitoring is an important part of the power equipment online monitoring system. [0003] On-line monitoring of the dissolved concentration of fault gases in oil-immersed transformers is an important part of the transformer on-line monitoring system. The monitoring of transformer oil fault gas routinely adopts periodic sampling in the laboratory, and uses gas chromatography to detect the fault gas dissolved in the oil. There are many operating procedures, time-consuming and labor-intensive, and long test cycles. Early warning cannot be give...

Claims

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Application Information

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IPC IPC(8): G01N27/30
CPCG01N27/307
Inventor 陆运章刘松杨晓生谢锋
Owner 48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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