Method for preparing amorphous film with gradient structure based on high-temperature ion irradiation

Abstract

The invention discloses a method for preparing an amorphous film with a gradient structure based on high-temperature ion irradiation. The structure is characterized in that on the basis of adopting a high-quality amorphous film plated by magnetron sputtering, high-temperature ion irradiation treatment is assisted, so that the surface of a sample is crystallized, and the interior of the sample is kept in an amorphous structure; and therefore, the high-strength and high-plasticity amorphous film with the gradient structure is prepared. The gradient amorphous thin film structure prepared by the method can be easily realized by controlling the temperature and the implantation dosage of an ion irradiation experiment, so that the possibility is provided for preparing a controllable amorphous thin film material with high mechanical property.

Description

technical field [0001] The invention belongs to the technical field of nanometer metal thin film materials, in particular to a method for preparing a high-strength, high-plastic gradient-structure amorphous film based on high-temperature ion irradiation. Background technique [0002] Amorphous alloys are different from crystalline materials in that they have the characteristics of long-range disorder and short-range order. This feature makes the strength and plastic deformation of amorphous alloys significantly different from crystalline materials. On the one hand, the strength of amorphous alloys is significantly higher than that of crystalline materials, making amorphous alloys one of the hot spots in the research and development of engineering materials. On the other hand, due to the lack of plastic deformation carriers such as dislocations in the crystal, the plastic deformation of amorphous alloys is usually concentrated in highly localized shear bands, which largely li...

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Problems solved by technology

Although this approach can greatly improve the plastic deformation ability of amorphous alloys, there are still two unavoidable defects: first, the composition, grain size and volume fraction of the crystal phase formed in amorphous alloys are not easy to control Secondly, although the prepared amorphous / crystalline composites have better plastic deformation ability than single-phase amorphous alloys, their strength tends to decline, that is, the advantages of high strength of amorphous alloys are weakened.

This method has the same problem as the above method: while improving the plastic deformation ability of the amorphous alloy, it will lead to a decrease in the strength of the amorphous alloy

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